Speeding up the unique assets of atomic layer deposition
Muñoz-Rojas, D., Maindron, T., Esteve, A., Piallat, F., Kools, J.C.S., Decams, J.-M.
Published in Materials today chemistry (01.06.2019)
Published in Materials today chemistry (01.06.2019)
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Journal Article
Electrical characterization of HfO2 films obtained by UV assisted injection MOCVD
DECAMS, J. M, GUILLON, H, RUSWORTH, S, LEEDHAM, T. J, DAVIES, H, FANG, Q, BOYD, I, JIMENEZ, C, AUDIER, M, SENATEUR, J. P, DUBOURDIEU, C, CADIX, O, O'SULLIVAN, B. J, MODREANU, M, HURLEY, P. K
Published in Microelectronics and reliability (01.05.2005)
Published in Microelectronics and reliability (01.05.2005)
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Conference Proceeding
Journal Article
Analysis of ZrxSiyOz as High-k Dielectric for 4H-SiC MOSFETs
Decams, Jean Manuel, Montserrat, Josep, Rebollo, José, Varghese, Aneesha, Godignon, Philippe, Cabello, Maria
Published in Materials science forum (05.06.2018)
Published in Materials science forum (05.06.2018)
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Journal Article
Synthesis and characterization of niobium(V) and tantalum(V) derivatives with diamido ligands. Molecular structure of {4,5-Me-2-0-C6H2(NSiMe3)(2)}(2)NbCl and of a tantalum imide
Decams, JM, Daniele, S, Hubert-Pfalzgraf, LG, Vaissermann, J, Lecocq, S
Published in Polyhedron (15.08.2001)
Published in Polyhedron (15.08.2001)
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Journal Article
The Quest for Single-Source Precursors for BaTiO3 and SrTiO3
Hubert-Pfalzgraf, Liliane G, Daniele, Stephane, Decams, Jean Manuel, Vaissermann, Jacqueline
Published in Journal of sol-gel science and technology (01.01.1997)
Published in Journal of sol-gel science and technology (01.01.1997)
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Journal Article