Systems, methods, and devices for mechanical isolation or mechanical damping of microfabricated inertial sensors
Kranz, Michael S, Dean, Jr., Robert Neal, Adams, Mark Lee, Bottenfield, Brent Douglas, English, Brian A, Bond, III, Arthur Gernt, Rudd, Carl
Year of Publication 28.03.2023
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Year of Publication 28.03.2023
Patent
Systems, methods, and devices for mechanical isolation or mechanical damping of microfabricated inertial sensors
Kranz, Michael S, Dean, Jr., Robert Neal, Adams, Mark Lee, Bottenfield, Brent Douglas, English, Brian A, Bond, III, Arthur Gernt, Rudd, Carl
Year of Publication 27.04.2021
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Year of Publication 27.04.2021
Patent