Apparent and steady-state etch rates in thin film etching and under-etching of microstructures: II. Characterization
Van Barel, Gregory, Du Bois, Bert, Van Hoof, Rita, De Wachter, Jef, De Ceuninck, Ward, Witvrouw, Ann
Published in Journal of micromechanics and microengineering (01.05.2010)
Published in Journal of micromechanics and microengineering (01.05.2010)
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