Low damage reactive ion etching process for fabrication of ridge waveguide lasers
Qiu, B.C., Ooi, B.S., Bryce, A.C., Hicks, S.E., Wilkinson, C.D.W., De La Rue, N.M., Marsh, J.H.
Published in Conference Proceedings. 1997 International Conference on Indium Phosphide and Related Materials (1997)
Published in Conference Proceedings. 1997 International Conference on Indium Phosphide and Related Materials (1997)
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