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Moslehi, M.M., Chapman, R.A., Wong, M., Paranjpe, A., Najm, H.N., Kuehne, J., Yeakley, R.L., Davis, C.J.
Published in IEEE transactions on electron devices (01.01.1992)
Published in IEEE transactions on electron devices (01.01.1992)
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Fast-cycle-time single-wafer IC manufacturing
Moslehi, Mehrdad M., Velo, Lino, Paranjpe, Ajit, Kuehne, John, Huang, Steve, Chapman, Richard, Schaper, Chuck, Breedijk, Terence, Najm, Habib, Yin, David, Lee, Yong Jin, Anderson, Dale, Davis, Cecil
Published in Microelectronic engineering (01.08.1994)
Published in Microelectronic engineering (01.08.1994)
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