Fabrication of silicon field-emission arrays using masks of amorphous hydrogenated carbon films
Takeuti, D.F., Tirolli, M.N., Danieli, C.L., Alves, M.A.R., Braga, E.S., de Faria, P.H.L.
Published in Microelectronics (01.01.2007)
Published in Microelectronics (01.01.2007)
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