4-inch transparent plates based on thin-film AlN actuators for haptic applications
Casset, F., Danel, JS, Renaux, P., Chappaz, C., Bernard, F., Sednaoui, T., Basrour, S., Desloges, B., Fanget, S.
Published in Mechatronics (Oxford) (01.12.2016)
Published in Mechatronics (Oxford) (01.12.2016)
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Journal Article
Resonant Asymmetric Micro-Mirror Using Electro Active Polymer Actuators
Casset, F., Poncet, P., Desloges, B., Dos Santos, F. Domingues, Danel, J.S., Fanget, S.
Published in 2018 IEEE SENSORS (01.10.2018)
Published in 2018 IEEE SENSORS (01.10.2018)
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Conference Proceeding
Development of a resonant asymmetric micro mirror using an electro active polymer actuation
Casset, F, Poncet, P, Desloges, B, Neff, B, Domingues Dos Santos, F, Danel, JS, Vimercati, M, Zanotti, L, Fanget, S
Published in Journal of physics. Conference series (01.11.2017)
Published in Journal of physics. Conference series (01.11.2017)
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Journal Article
Deep and fast plasma etching for silicon micromachining
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Journal Article
Conference Proceeding
Design of thin-film AlN actuators for 4-inch transparent plates for haptic applications
Casset, F., Danel, Js, Chappaz, C., Bernard, F., Basrour, S., Desloges, B., Fanget, S.
Published in 2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (01.04.2015)
Published in 2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (01.04.2015)
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Conference Proceeding
The electrostatic ultrasonic micromotor
Robert, Ph, Danel, J S, Villard, P
Published in Journal of micromechanics and microengineering (01.09.1997)
Published in Journal of micromechanics and microengineering (01.09.1997)
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Journal Article
Conference Proceeding
Characterization and post simulation of thin-film PZT actuated plates for haptic applications
Casset, F., Danel, Js, Renaux, P., Chappaz, C., Le Rhun, G., Dieppedale, C., Gorisse, M., Basrour, S., Fanget, S., Ancey, P., Devos, A., Defay, E.
Published in 2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (01.04.2014)
Published in 2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (01.04.2014)
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Conference Proceeding
The electrostatic ultrasonic micromotor
Danel, J., Charvel, P., Robert, P., Villard, P.
Published in Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) (1997)
Published in Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) (1997)
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Conference Proceeding
Application of quartz micromachining to the realization of a pressure sensor
Danel, J.S., Dufour, M., Michel, F.
Published in 1993 IEEE International Frequency Control Symposium (1993)
Published in 1993 IEEE International Frequency Control Symposium (1993)
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Conference Proceeding
Enhancement of quartz electrical conductivity by ion implantation
Danel, J.S., Martin, P., Dufour, M., Ermolieff, A., Marthon, S., Pierre, F., Dupuy, M.
Published in 1993 IEEE International Frequency Control Symposium (1993)
Published in 1993 IEEE International Frequency Control Symposium (1993)
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Conference Proceeding