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Year of Publication 24.09.2013
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Year of Publication 24.09.2013
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Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
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Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
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Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
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Initial and final orbital alignment probing of the fine-structure-changing collisions among the Ca (4s)1(4p)1, 3P J states with He: determination of coherence and conventional cross-sections
Smith, Christopher J., Spain, Eileen M., Dalberth, Mark J., Leone, Stephen R., Driessen, Jan P. J.
Published in Journal of the Chemical Society. Faraday transactions (1993)
Published in Journal of the Chemical Society. Faraday transactions (1993)
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Atomic layer deposition head
Coutu Roger R, Sershen Michael J, Sundaram Ganesh M, Becker Jill Svenja, Dalberth Mark J
Year of Publication 10.10.2017
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Year of Publication 10.10.2017
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Thin films for 3D: ALD for non-planar topographies
Sundaram, Ganesh M, Deguns, Eric W, Bhatia, Ritwik, Dalberth, Mark J, Sowa, Mark, Becker, Jill S
Published in Solid state technology (01.06.2009)
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Published in Solid state technology (01.06.2009)
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Atomic Layer Deposition Head
COUTU ROGER R, SERSHEN MICHAEL J, BECKER JILL SVENJA, SUNDARAM GANESH M, DALBERTH MARK J
Year of Publication 28.04.2016
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Year of Publication 28.04.2016
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Atomic Layer Deposition of Molybdenum Oxide Using Bis(Tert-Butylimido)Bis(Dimethylamido) Molybdenum
Bertuch, Adam, Lecordier, Laurent, Dalberth, Mark, Sundaram, Ganesh, Becker, Jill, Deguns, Eric, Saly, Mark, Moser, Daniel, Kanjolia, Ravi
Published in Meeting abstracts (Electrochemical Society) (04.06.2012)
Published in Meeting abstracts (Electrochemical Society) (04.06.2012)
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Journal Article
Plasma-Enabled ALD of Niobium Nitride with Organometallic Nb Precursors
Deguns, Eric, Sowa, Mark, Dalberth, Mark, Bhatia, Ritwik, Kanjolia, Ravi, Moser, Dan, Sundaram, Ganesh, Becker, Jill
Published in Meeting abstracts (Electrochemical Society) (08.07.2010)
Published in Meeting abstracts (Electrochemical Society) (08.07.2010)
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Journal Article
Large Format Atomic Layer Deposition
Sundaram, Ganesh, Bertuch, Adam, Bhatia, Ritwik, Dalberth, Mark, Deguns, Eric, Liu, Guo, Sowa, Mark, Becker, Jill
Published in Meeting abstracts (Electrochemical Society) (08.07.2010)
Published in Meeting abstracts (Electrochemical Society) (08.07.2010)
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Properties of Hafnium Oxide Deposited with Ozone or Oxygen Plasma
Dalberth, Mark, Sowa, Mark, Deguns, Eric, Bhatia, Ritwik, Bertuch, Adam, Liu, Guo, Sundaram, Ganesh, Becker, Jill
Published in Meeting abstracts (Electrochemical Society) (08.07.2010)
Published in Meeting abstracts (Electrochemical Society) (08.07.2010)
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Atomic Layer Deposition of AlN with Tris(Dimethylamido)Aluminum and NH 3
Liu, Guo, Deguns, Eric, Sowa, Mark, Bhatia, Ritwik, Bertuch, Adam, Dalberth, Mark, Lecordier, Laurent, Sundaram, Ganesh, Becker, Jill
Published in Meeting abstracts (Electrochemical Society) (01.08.2011)
Published in Meeting abstracts (Electrochemical Society) (01.08.2011)
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Journal Article
ALD COATING SYSTEM
COUTU ROGER R, SERSHEN MICHAEL J, BECKER JILL SVENJA, SUNDARAM GANESH M, DALBERTH MARK J
Year of Publication 07.06.2012
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Year of Publication 07.06.2012
Patent
ALD COATING SYSTEM
BECKER, JILL, SVENJA, DALBERTH, MARK, J, SERSHEN, MICHAEL, J, SUNDARAM, GANESH, M, COUTU, ROGER, R
Year of Publication 19.04.2012
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Year of Publication 19.04.2012
Patent
METHOD AND APPARATUS FOR PRECURSOR DELIVERY
BECKER JILL SVENJA, LIU GUO, BERTUCH ADAM, DEGUNS ERIC W, DALBERTH MARK J, SUNDARAM GANESH M
Year of Publication 22.12.2011
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Year of Publication 22.12.2011
Patent
METHOD AND APPARATUS FOR PRECURSOR DELIVERY
BECKER, JILL, SVENJA, BERTUCH, ADAM, DALBERTH, MARK, J, DEGUNS, ERIC, W, BHATIA, RITWIK, SUNDARAM, GANESH, M, LIU, GUO
Year of Publication 22.12.2011
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Year of Publication 22.12.2011
Patent