Hybrid simulation of instabilities in capacitively coupled RF CF4/Ar plasmas
Dong, Wan, Zhang, Yi-Fan, Dai, Zhong-Ling, Schulze, Julian, Song, Yuan-Hong, Wang, You-Nian
Published in Plasma sources science & technology (01.02.2022)
Published in Plasma sources science & technology (01.02.2022)
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Journal Article
Hybrid simulation of instabilities in capacitively coupled RF CF 4 /Ar plasmas
Dong, Wan, Zhang, Yi-Fan, Dai, Zhong-Ling, Schulze, Julian, Song, Yuan-Hong, Wang, You-Nian
Published in Plasma sources science & technology (01.02.2022)
Published in Plasma sources science & technology (01.02.2022)
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Journal Article
Discharge mode and particle transport in radio frequency capacitively coupled Ar/O2 plasma discharges
Gao, Zhuo-Yao, Dong, Wan, Tian, Chong-Biao, Jiang, Xing-Zhao, Dai, Zhong-Ling, Song, Yuan-Hong
Published in Chinese physics B (01.09.2024)
Published in Chinese physics B (01.09.2024)
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Journal Article
Spatiotemporal characteristics of the collisionless rf sheath and the ion energy distributions arriving at rf-biased electrodes
Dai, Zhong-Ling, Wang, You-Nian, Ma, Teng-Cai
Published in Physical review. E, Statistical, nonlinear, and soft matter physics (01.03.2002)
Published in Physical review. E, Statistical, nonlinear, and soft matter physics (01.03.2002)
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Journal Article
Multiple ion dynamics model for the collisionless rf sheaths and the ion energy distributions at rf-biased electrodes in fluorocarbon plasmas
Dai, Zhong-Ling, Wang, You-Nian
Published in Physical review. E, Statistical, nonlinear, and soft matter physics (01.08.2002)
Published in Physical review. E, Statistical, nonlinear, and soft matter physics (01.08.2002)
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Journal Article
Discharge mode and particle transport in radio frequency capacitively coupled Ar/O 2 plasma discharges
Gao 高, Zhuo-Yao 卓瑶, Dong 董, Wan 婉, Tian 田, Chong-Biao 崇彪, Jiang 蒋, Xing-Zhao 星照, Dai 戴, Zhong-Ling 忠玲, Song 宋, Yuan-Hong 远红
Published in Chinese physics B (01.09.2024)
Published in Chinese physics B (01.09.2024)
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Journal Article