Systematic methods to identify and verify non-visible defects in silicon substrate
Hongwei Huang, Wei, Winnie, Xin, J. J., Liu, Candy, Wu, Luke, Dai, Clieve, Pinglung Liao, Wei Xu
Published in Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.06.2014)
Published in Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (01.06.2014)
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