Undoped SiGe material calibration for numerical nanosecond laser annealing simulations
Royet, A-S., Dagault, L., Kerdiles, S., Alba, P. Acosta, Barnes, J.P, Cristiano, F., Huet, K.
Published in 2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (23.09.2020)
Published in 2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (23.09.2020)
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Conference Proceeding
Stress relaxation and dopant activation in nsec laser annealed SiGe
Cristiano, F., Monflier, R., Daubriac, R., Demoulin, R., Scheid, E., Dagault, L., Royet, A-S., Alba, P. Acosta, Kerdiles, S.
Published in 2021 20th International Workshop on Junction Technology (IWJT) (10.06.2021)
Published in 2021 20th International Workshop on Junction Technology (IWJT) (10.06.2021)
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Conference Proceeding
Investigation of recrystallization and stress relaxation in nanosecond laser annealed Si1−xGex/Si epilayers
Dagault, L., Kerdilès, S., Acosta Alba, P., Hartmann, J.-M., Barnes, J.-P., Gergaud, P., Scheid, E., Cristiano, F.
Published in Applied surface science (15.10.2020)
Published in Applied surface science (15.10.2020)
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Journal Article
Investigation of recrystallization and stress relaxation in nanosecond laser annealed Si 1−x Ge x /Si epilayers
Dagault, L., Kerdilès, S., Acosta-Alba, P, Hartmann, J.-M., Barnes, J.-P., Gergaud, P., Scheid, Emmanuel, Cristiano, Fuccio
Published in Applied surface science (01.10.2020)
Published in Applied surface science (01.10.2020)
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Journal Article
Pulsed laser annealing for advanced technology nodes: Modeling and calibration
Huet, K., Aubin, J., Raynal, P.-E., Curvers, B., Verstraete, A., Lespinasse, B., Mazzamuto, F., Sciuto, A., Lombardo, S.F., La Magna, A., Acosta-Alba, P., Dagault, L., Licitra, C., Hartmann, J.-M., Kerdilès, S.
Published in Applied surface science (01.03.2020)
Published in Applied surface science (01.03.2020)
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Journal Article
Impact of UV Nanosecond Laser Annealing on Composition and Strain of Undoped Si0.8Ge0.2 Epitaxial Layers
Dagault, L., Acosta-Alba, P., Kerdilès, S., Barnes, J. P., Hartmann, J. M., Gergaud, P., Nguyen, T. T., Grenier, A., Papon, A. M., Bernier, N., Delaye, V., Aubin, J., Cristiano, F.
Published in ECS journal of solid state science and technology (2019)
Published in ECS journal of solid state science and technology (2019)
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Journal Article
Impact of UV Nanosecond Laser Annealing on Composition and Strain of Undoped Si 0.8 Ge 0.2 Epitaxial Layers
Dagault, L., Acosta-Alba, P., Kerdilès, S., Barnes, J. P., Hartmann, J. M., Gergaud, P., Nguyen, T. T., Grenier, A., Papon, A. M., Bernier, N., Delaye, V., Aubin, J., Cristiano, F.
Published in ECS journal of solid state science and technology (2019)
Published in ECS journal of solid state science and technology (2019)
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Journal Article
Composition and Strain Evolution of Undoped Si0.8Ge0.2 Layers Submitted to UV-Nanosecond Laser Annealing
Dagault, Lea, Acosta-Alba, Pablo, Kerdilès, Sébastien, Barnes, Jean-Paul, Hartmann, Jean-Michel, Gergaud, Patrice, Nguyen, Than Tra, Grenier, Adeline, Aubin, Joris, Cristiano, Fuccio
Published in ECS transactions (20.07.2018)
Published in ECS transactions (20.07.2018)
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Journal Article
Strain buildup in 4H-SiC implanted with noble gases at low dose
Jiang, C., Dagault, L., Audurier, V., Tromas, C., Declémy, A., Beaufort, M.F., Barbot, J.F.
Published in Materials today : proceedings (2018)
Published in Materials today : proceedings (2018)
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Journal Article