SHAPED ELECTRODES FOR IMPROVED PLASMA EXPOSURE FROM VERTICAL PLASMA SOURCE
DZILNO DMITRY A, SUBRAMANI ANANTHA K, TANAKA TSUTOMU, BERA KALLOL, FORSTER JOHN C
Year of Publication 30.08.2022
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Year of Publication 30.08.2022
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세라믹 전극 플레이트를 갖는 플라즈마 소스
DZILNO DMITRY A, GARACHTCHENKO ALEXANDER V, MOORE ROBERT B, LEE JARED AHMAD, TANAKA TSUTOMU, SHULL MARC DAVID
Year of Publication 04.07.2023
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Year of Publication 04.07.2023
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전하 손상을 방지하기 위해 플라즈마 펄싱을 이용하는 공간적 원자 층 증착 챔버
DZILNO DMITRY A, TANAKA KEIICHI, GARACHTCHENKO ALEXANDER V, TANAKA TSUTOMU
Year of Publication 22.07.2020
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Year of Publication 22.07.2020
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ALD POSITION AND TEMPERATURE MONITORING OF ALD PLATEN SUSCEPTOR
GRIFFIN KEVIN, DZILNO DMITRY A, RAVID ABRAHAM, YUDOVSKY JOSEPH, GANGAKHEDKAR KAUSHAL, MINKOVICH ALEX
Year of Publication 05.04.2022
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Year of Publication 05.04.2022
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PE-ALD MICROWAVE PLASMA SOURCE FOR SPATIAL PLASMA ENHANCED ATOMIC LAYER DEPOSITION PE-ALD PROCESSING TOOL
DZILNO DMITRY A, SUBRAMANI ANANTHA K, GARACHTCHENKO ALEXANDER V, LI XIAOPU, TANAKA TSUTOMU, SHERVEGAR AVINASH, BERA KALLOL, FORSTER JOHN C, KUDELA JOZEF
Year of Publication 09.02.2023
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Year of Publication 09.02.2023
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정전 척을 위한 전력 공급 신호 컨디셔닝
DZILNO DMITRY A, ROCHA ALVAREZ JUAN CARLOS, KAMATH SANJAY G, ENSLOW KRISTOPHER R, RAJ DAEMIAN RAJ BENJAMIN, KESHRI ABHIGYAN, HOWLADER RANA, SRIVASTAVA SHAILENDRA, HAMMOND EDWARD P, PADHI DEENESH, YE ZHENG JOHN, HAN XINHAI
Year of Publication 31.05.2023
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Year of Publication 31.05.2023
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수직 플라즈마 소스로부터의 개선된 플라즈마 노출을 위한 성형된 전극들
DZILNO DMITRY A, SUBRAMANI ANANTHA K, TANAKA TSUTOMU, BERA KALLOL, FORSTER JOHN C
Year of Publication 22.07.2020
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Year of Publication 22.07.2020
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다수의 주파수들에서 RF 파라미터들을 제어하기 위한 방법들 및 장치
DZILNO DMITRY A, JORAPUR NIKHIL SUDHINDRARAO, ROCHA JUAN CARLOS, BENJAMIN RAJ DAEMIAN RAJ, SRIVASTAVA SHAILENDRA, YE ZHENG JOHN, MUKUTI NDANKA O
Year of Publication 12.04.2022
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Year of Publication 12.04.2022
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PHASED ARRAY MODULAR HIGH-FREQUENCY SOURCE
DZILNO DMITRY A, CHUA THAI CHENG, KRAUS PHILIP ALLAN, AMORMINO CHRISTIAN
Year of Publication 30.10.2019
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Year of Publication 30.10.2019
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공간적 플라즈마 강화 원자층 증착(PE-ALD) 프로세싱 툴을 위한 마이크로파 플라즈마 소스
DZILNO DMITRY A, SUBRAMANI ANANTHA K, GARACHTCHENKO ALEXANDER V, LI XIAOPU, TANAKA TSUTOMU, SHERVEGAR AVINASH, BERA KALLOL, FORSTER JOHN C, KUDELA JOZEF
Year of Publication 12.10.2020
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Year of Publication 12.10.2020
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저주파수 바이어스를 활용한 유전체 막들의 기하학적 선택적 증착
DZILNO DMITRY A, TANAKA KEIICHI, SILVETTI MARIO D, OHNO KENICHI, GARACHTCHENKO ALEXANDER V, XIA LI QUN, MURTAGH MIKE, TANAKA TSUTOMU, FORSTER JOHN C, RAMADAS RAKESH
Year of Publication 24.07.2020
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Year of Publication 24.07.2020
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TEMPERATURE CONTROL APPARATUS INCLUDING GROOVE-ROUTED OPTICAL FIBER HEATING SUBSTRATE TEMPERATURE CONTROL SYSTEMS ELECTRONIC DEVICE PROCESSING SYSTEMS AND PROCESSING METHODS
DZILNO DMITRY A, BUSCHE MATTHEW, BOYD WENDELL JR, PARKHE VIJAY D, RICE MICHAEL R, VOLFOVSKI LEON
Year of Publication 14.03.2017
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Year of Publication 14.03.2017
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POSITION AND TEMPERATURE MONITORING OF ALD PLATEN SUSCEPTOR
GRIFFIN KEVIN, DZILNO DMITRY A, RAVID ABRAHAM, YUDOVSKY JOSEPH, GANGAKHEDKAR KAUSHAL, MINKOVICH ALEX
Year of Publication 23.11.2015
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Year of Publication 23.11.2015
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METHODS AND APPARATUS FOR PROCESSING SUBSTRATES USING MODEL-BASED CONTROL
DZILNO DMITRY A, LI HONGBIN, MERRY NIR, GREGOR MARIUSCH, RICE MICHAEL R, MINKOVICH ALEX, PORTHOUSE KEITH BRIAN, LANE JOHN W
Year of Publication 02.05.2014
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Year of Publication 02.05.2014
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