An improved gallium liquid metal ion source geometry for nanotechnology
VAN ES, J. J, GIERAK, J, FORTIES, R. G, SUVOROV, V. G, VAN DEN BERGHE, T, DUBUISSON, Ph, MONNET, I, SEPTIER, A
Published in Microelectronic engineering (01.06.2004)
Published in Microelectronic engineering (01.06.2004)
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Conference Proceeding
Journal Article
An improved gallium liquid metal ion source geometry for nanotechnology
Van Es, J.J., Gierak, J., Forbes, R.G., Suvorov, V.G., Van den Berghe, T., Dubuisson, Ph, Monnet, I., Septier, A.
Published in Microelectronic engineering (01.06.2004)
Published in Microelectronic engineering (01.06.2004)
Get full text
Journal Article