PROCESSING SYSTEM CONTAINING AN ISOLATION REGION SEPARATING A DEPOSITION CHAMBER FROM A TREATMENT CHAMBER
PONNEKANTI HARI K, ROCHA ALVAREZ JUAN CARLOS, SRIRAM MANDYAM, DUBOIS DALE R, JANAKIRAMAN KARTHIK, MALLICK ABHIJIT BASU, DEMOS ALEXANDROS T, SRINIVASAN MUKUND
Year of Publication 16.05.2016
Get full text
Year of Publication 16.05.2016
Patent
DUAL DELIVERY CHAMBER DESIGN
NOWAK THOMAS, LEE, YONG WON, ROCHA ALVAREZ JUAN CARLOS, DUBOIS DALE R, HENDRICKSON SCOTT A, BALUJA SANJEEV, SHEK MEI YEE, XIA LI QUN, WITTY DEREK R, IYENGAR PRAHALLAD
Year of Publication 19.03.2014
Get full text
Year of Publication 19.03.2014
Patent
TUNABLE GROUND PLANES IN PLASMA CHAMBERS
NOWAK THOMAS, ROCHA ALVAREZ JUAN CARLOS, M'SAAD HI, DUBOIS DALE R, JUCO ELLER Y, FODOR MARK A, JANAKIRAMAN KARTHIK, BANSAL AMIT, AYOUB MOHAMAD, SIVARAMAKRISHNAN VISWESWAREN
Year of Publication 01.12.2010
Get full text
Year of Publication 01.12.2010
Patent
PROCESS AND APPARATUS FOR CLEANING SILICON SURFACE
CURELOP BRADLEY M, DUBOIS DALE R, SAMOILOV ARKADII, COMITA PAUL B, CARLSON DAVID K
Year of Publication 20.08.2001
Get full text
Year of Publication 20.08.2001
Patent
CHEMICAL VAPOR DEPOSITION APPARATUS
CAMPBELL, BRYANT A, DUBOIS, DALE R, MANRIQUEZ, RALPH F, MILLER, NICHOLAS E
Year of Publication 26.07.1989
Get full text
Year of Publication 26.07.1989
Patent
Multi-zone pedestal for plasma processing
Lin, Xing, Yang, Bozhi, Dubois, Dale R, Rocha-Alvarez, Juan Carlos, Sankarakrishnan, Ramprakash, Zhou, Jianhua
Year of Publication 06.04.2021
Get full text
Year of Publication 06.04.2021
Patent
MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING
SANKARAKRISHNAN, Ramprakash, YANG, Bozhi, ZHOU, Jianhua, ROCHA-ALVAREZ, Juan Carlos, LIN, Xing, DUBOIS, Dale R
Year of Publication 31.01.2019
Get full text
Year of Publication 31.01.2019
Patent
Multi-zone pedestal for plasma processing
Lin, Xing, Yang, Bozhi, Dubois, Dale R, Rocha-Alvarez, Juan Carlos, Sankarakrishnan, Ramprakash, Zhou, Jianhua
Year of Publication 02.10.2018
Get full text
Year of Publication 02.10.2018
Patent
Process kit including flow isolator ring
Wang, Yanjie, Ghosh, Kalyanjit, Baluja, Sanjeev, Dubois, Dale R, Chuc, Kien N, Kim, Sungjin, Kulkarni, Mayur G
Year of Publication 30.10.2018
Get full text
Year of Publication 30.10.2018
Patent
MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING
YANG Bozhi, ZHOU Jianhua, SANKARAKRISHNAN Ramprakash, LIN Xing, DUBOIS Dale R, ROCHA-ALVAREZ Juan Carlos
Year of Publication 14.09.2017
Get full text
Year of Publication 14.09.2017
Patent
Multi-zone pedestal for plasma processing
Rocha-Alvarez Juan Carlos, Zhou Jianhua, Lin Xing, Yang Bozhi, Dubois Dale R, Sankarakrishnan Ramprakash
Year of Publication 08.08.2017
Get full text
Year of Publication 08.08.2017
Patent
Processing system containing an isolation region separating a deposition chamber from a treatment chamber
Sriram, Mandyam, Srinivasan, Mukund, Dubois, Dale R, Mallick, Abhijit Basu, Ponnekanti, Hari K, Rocha-Alvarez, Juan Carlos, Janakiraman, Karthik, Demos, Alexandros T
Year of Publication 19.03.2019
Get full text
Year of Publication 19.03.2019
Patent
MULTI-ZONE PEDESTAL FOR PLASMA PROCESSING
DUBOIS DALE R, SANKARAKRISHNAN RAMPRAKASH, ROCHA-ALVAREZ JUAN CARLOS, LIN XING, YANG BOZHI, ZHOU JIANHUA
Year of Publication 07.01.2016
Get full text
Year of Publication 07.01.2016
Patent
PROCESS KIT INCLUDING FLOW ISOLATOR RING
KULKARNI Mayur G, CHUC Kien N, KIM Sungjin, GHOSH Kalyanjit, WANG Yanjie, DUBOIS Dale R, BALUJA Sanjeev
Year of Publication 27.10.2016
Get full text
Year of Publication 27.10.2016
Patent