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Year of Publication 16.01.2015
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Year of Publication 16.01.2015
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Method and apparatus which reduce the erosion rate of surfaces exposed to halogen-containing plasmas
YUAN, JIE, XU, LI, COLLINS, KENNETH S, DUAN, REN-GUAN, SUN, JENNIFER Y
Year of Publication 16.01.2015
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Year of Publication 16.01.2015
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Year of Publication 03.09.2009
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Year of Publication 27.08.2009
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Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics
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Year of Publication 01.11.2013
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Erosion resistant yttrium comprising metal with oxidized coating for plasma chamber components
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Year of Publication 21.11.2014
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Chamber coatings
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Year of Publication 16.09.2015
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METHOD AND APPARATUS FOR REMOVING POLYMER FROM A SUBSTRATE
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Year of Publication 05.11.2009
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Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in plasma enhanced chemical vapor deposition system
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Year of Publication 19.04.2017
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Year of Publication 19.04.2017
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METHOD AND APPARATUS FOR REMOVING POLYMER FROM A SUBSTRATE
COLLINS, KENNETH, MERRY, WALTER, YUAN, JIE, RUI, YING, NGUYEN, ANDREW, YOUSIF, IMAD, DUAN, REN-GUAN, SUN, JENNIFER, SALINAS, MARTIN, RAMASWAMY, KARTIK, HE, XIAOMING, FUNG, NANCY, HOFFMAN, DANIEL, J
Year of Publication 11.09.2009
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Year of Publication 11.09.2009
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Ceramic coating comprising yttrium which is resistant to a reducing plasma
HE, XIAOMING, YUAN, JIE, XU, LI, COLLINS, KENNETH S, DUAN, REN-GUAN, SUN, JENNIFER Y, GRAVES, THOMAS, THACH, SENH
Year of Publication 11.10.2014
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Year of Publication 11.10.2014
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Ceramic coating comprising yttrium which is resistant to a reducing plasma
XU LI, YUAN JIE, HE XIAOMING, DUAN REN-GUAN, GRAVES THOMAS, COLLINS KENNETH S, THACH SENH, SUN JENNIFER Y
Year of Publication 09.07.2014
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Year of Publication 09.07.2014
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