Apparatus and method for UV treatment, chemical treatment, and deposition
Hendrickson, Scott A, Du Bois, Dale R, Baluja, Sanjeev, Bansal, Amit, Rocha-Alvarez, Juan Carlos, Nowak, Thomas
Year of Publication 25.02.2020
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Year of Publication 25.02.2020
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In-situ metrology method for thickness measurement during PECVD processes
Paul, Khokan C, Lee, Jeongmin, Du Bois, Dale R, Egan, Todd, Vaez-Iravani, Mehdi, Budiarto, Edward, Lee, Terrance Y
Year of Publication 07.01.2020
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Year of Publication 07.01.2020
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Wafer swapper
Du Bois, Dale R, Baluja, Sanjeev, Wilton, Prajeeth, Ponnekanti, Hari K, Rocha-Alvarez, Juan Carlos, Janakiraman, Karthik
Year of Publication 31.12.2019
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Year of Publication 31.12.2019
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Tunable ground planes in plasma chambers
Sivaramakrishnan, Visweswaren, M'Saad, Hichem, Ayoub, Mohamad, Du Bois, Dale R, Bansal, Amit, Rocha-Alvarez, Juan Carlos, Janakiraman, Karthik, Nowak, Thomas, Fodor, Mark A, Juco, Eller Y
Year of Publication 15.09.2020
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Year of Publication 15.09.2020
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DUAL TEMPERATURE HEATER
YAP, Lipyeow, NOWAK, Thomas, Du BOIS, Dale R, BALUJA, Sanjeev, ZHOU, Jianhua, ROCHA-ALVAREZ, Juan Carlos, BALASUBRAMANIAN, Ganesh
Year of Publication 03.10.2019
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Year of Publication 03.10.2019
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TEMPERATURE MEASUREMENT IN MULTI-ZONE HEATER
Bansal, Amit Kumar, Yang, Bozhi, Du Bois, Dale R, Baluja, Sanjeev, Rocha-Alvarez, Juan Carlos, Zhou, Jianhua
Year of Publication 04.07.2019
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Year of Publication 04.07.2019
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Dual temperature heater
Du Bois, Dale R, Baluja, Sanjeev, Balasubramanian, Ganesh, Yap, Lipyeow, Rocha-Alvarez, Juan Carlos, Nowak, Thomas, Zhou, Jianhua
Year of Publication 18.06.2019
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Year of Publication 18.06.2019
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In-situ metrology method for thickness measurement during PECVD processes
Paul, Khokan C, Lee, Jeongmin, Du Bois, Dale R, Egan, Todd, Vaez-Iravani, Mehdi, Budiarto, Edward, Lee, Terrance Y
Year of Publication 07.05.2019
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Year of Publication 07.05.2019
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Substrate temperature measurement in multi-zone heater
Bansal, Amit Kumar, Yang, Bozhi, Du Bois, Dale R, Baluja, Sanjeev, Rocha-Alvarez, Juan Carlos, Zhou, Jianhua
Year of Publication 11.12.2018
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Year of Publication 11.12.2018
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Method and system for supplying a cleaning gas into a process chamber
Sivaramakrishnan, Visweswaren, M'Saad, Hichem, Du Bois, Dale R, Balasubramanian, Ganesh, Rocha-Alvarez, Juan Carlos, Janakiraman, Karthik, Nowak, Thomas, Sankarakrishnan, Ramprakash
Year of Publication 09.10.2018
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Year of Publication 09.10.2018
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Loadlock integrated bevel etcher system
Basu, Saptarshi, Du Bois, Dale R, Waqar, Mohsin, Berens, Brett, Ponnekanti, Hari K, Lee, Kwangduk Douglas, Rocha-Alvarez, Juan Carlos, Gilbert, Rick, Zhou, Jianhua, Lee, Jeongmin, Ghosh, Kalyanjit, Balasubramanian, Ganesh, Kulshreshtha, Prashant Kumar, Krivulina, Liliya, Shankaramurthy, Venkatanarayana, Narasimha, Karthik Thimmavajjula, Connors, Paul, Ogiso, Hiroyuki
Year of Publication 08.06.2021
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Year of Publication 08.06.2021
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Wafer swapper
Rocha-Alvarez Juan Carlos, Du Bois Dale R, Baluja Sanjeev, Ponnekanti Hari K, Wilton Prajeeth, Janakiraman Karthik
Year of Publication 13.02.2018
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Year of Publication 13.02.2018
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Loadlock integrated bevel etcher system
Basu, Saptarshi, Du Bois, Dale R, Waqar, Mohsin, Berens, Brett, Ponnekanti, Hari K, Lee, Kwangduk Douglas, Rocha-Alvarez, Juan Carlos, Gilbert, Rick, Zhou, Jianhua, Lee, Jeongmin, Ghosh, Kalyanjit, Balasubramanian, Ganesh, Kulshreshtha, Prashant Kumar, Krivulina, Liliya, Shankaramurthy, Venkatanarayana, Narasimha, Karthik Thimmavajjula, Connors, Paul, Ogiso, Hiroyuki
Year of Publication 28.04.2020
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Year of Publication 28.04.2020
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Wafer rotation in a semiconductor chamber
Floyd Kirby H, Nguyen Tuan Anh, Rocha-Alvarez Juan Carlos, Du Bois Dale R, Kim Robert, Bansal Amit Kumar, Balasubramanian Ganesh, Sankarakrishnan Ramprakash
Year of Publication 20.03.2018
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Year of Publication 20.03.2018
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Shadow ring for modifying wafer edge and bevel deposition
Rocha, Juan Carlos, Ayoub, Mohamad A, Yu, Hang, Du Bois, Dale R, Kim, Robert, Fodor, Mark, Nguyen, Binh, Balasubramanian, Ganesh, Bansal, Amit, Chan, Chiu, Cheng, Siu F, Padhi, Deenesh
Year of Publication 12.03.2019
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Year of Publication 12.03.2019
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LOADLOCK INTEGRATED BEVEL ETCHER SYSTEM
Basu, Saptarshi, Du Bois, Dale R, Waqar, Mohsin, Berens, Brett, Ponnekanti, Hari K, Lee, Kwangduk Douglas, Rocha-Alvarez, Juan Carlos, Gilbert, Rick, Zhou, Jianhua, Lee, Jeongmin, Ghosh, Kalyanjit, Balasubramanian, Ganesh, Kulshreshtha, Prashant Kumar, Krivulina, Liliya, Shankaramurthy, Venkatanarayana, Narasimha, Karthik Thimmavajjula, Connors, Paul, Ogiso, Hiroyuki
Year of Publication 05.12.2019
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Year of Publication 05.12.2019
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Loadlock integrated bevel etcher system
Basu, Saptarshi, Du Bois, Dale R, Waqar, Mohsin, Berens, Brett, Ponnekanti, Hari K, Lee, Kwangduk Douglas, Rocha-Alvarez, Juan Carlos, Gilbert, Rick, Zhou, Jianhua, Lee, Jeongmin, Ghosh, Kalyanjit, Balasubramanian, Ganesh, Kulshreshtha, Prashant Kumar, Krivulina, Liliya, Shankaramurthy, Venkatanarayana, Narasimha, Karthik Thimmavajjula, Connors, Paul, Ogiso, Hiroyuki
Year of Publication 03.09.2019
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Year of Publication 03.09.2019
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