Deep implant self-aligned to polysilicon gate
LAHAV ASSAF, SERGIENKO ANATOLY, KFIR SHAI, DROWLEY CLIFFORD I, INBAR NAOR, KOROBOV VLADIMIR, COHEN DAVID
Year of Publication 06.07.2010
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Year of Publication 06.07.2010
Patent
Deep implant self-aligned to polysilicon gate
Drowley, Clifford I, Cohen, David, Lahav, Assaf, Kfir, Shai, Inbar, Naor, Sergienko, Anatoly, Korobov, Vladimir
Year of Publication 06.07.2010
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Year of Publication 06.07.2010
Patent
Deep Implant Self-Aligned To Polysilicon Gate
DROWLEY CLIFFORD IAN, LAHAV ASSAF, SERGIENKO ANATOLY, KFIR SHAI, INBAR NAOR, KOROBOV VLADIMIR, COHEN DAVID
Year of Publication 02.10.2008
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Year of Publication 02.10.2008
Patent