About stress in filled DRIE-trenches
Kaiser, Bert, Drabe, Christian, Graßhoff, Thomas, Conrad, Holger, Schenk, Harald
Published in Journal of micromechanics and microengineering (01.08.2015)
Published in Journal of micromechanics and microengineering (01.08.2015)
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Journal Article
Single crystal silicon micro mirrors
Schenk, Harald, Sandner, Thilo, Drabe, Christian, Klose, Thomas, Conrad, Holger
Published in Physica status solidi. C (01.03.2009)
Published in Physica status solidi. C (01.03.2009)
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Journal Article