Brush force control method for a substrate cleaning apparatus
MIDDENDORF DANIEL O, JOHNSON JAMES G, SLAVIK THOMAS R, DONOVAN DEAN A
Year of Publication 03.06.2003
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Year of Publication 03.06.2003
Patent
Brush force control method for a substrate cleaning apparatus
Middendorf, Daniel O, Slavik, Thomas R, Johnson, James G, Donovan, Dean A
Year of Publication 03.06.2003
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Year of Publication 03.06.2003
Patent
Substrate cleaning apparatus with brush force control and method
MIDDENDORF DANIEL O, JOHNSON JAMES G, SLAVIK THOMAS R, DONOVAN DEAN A
Year of Publication 02.01.2003
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Year of Publication 02.01.2003
Patent
Substrate cleaning apparatus with brush force control and method
MIDDENDORF DANIEL O, JOHNSON JAMES G, SLAVIK THOMAS R, DONOVAN DEAN A
Year of Publication 10.09.2002
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Year of Publication 10.09.2002
Patent
Substrate cleaning apparatus with brush force control and method
Middendorf, Daniel O, Slavik, Thomas R, Johnson, James G, Donovan, Dean A
Year of Publication 10.09.2002
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Year of Publication 10.09.2002
Patent