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Year of Publication 22.08.2022
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Year of Publication 19.01.2023
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Year of Publication 14.05.2020
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Reflective optical element
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Year of Publication 10.10.2016
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Year of Publication 10.10.2016
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Year of Publication 06.10.2016
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Year of Publication 22.06.2022
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Year of Publication 22.06.2022
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Calibration system for extreme ultraviolet light source
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Year of Publication 29.07.2022
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Year of Publication 29.07.2022
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Year of Publication 29.06.2017
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Year of Publication 29.06.2017
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Year of Publication 28.06.2017
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Year of Publication 28.06.2017
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Calibration system for an extreme ultraviolet light source
RIGGS, DANIEL JASON, LEENDERS, MARTINUS HENDRIKUS ANTONIUS, DONKER, RILPHO LUDOVICUS, MATTHES, LIANE MANUELA
Year of Publication 16.11.2021
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Year of Publication 16.11.2021
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Precise vacuum window viewport and pellicle for fast metrology recovery
SIMMONS, ROBERT, D, KAMBHAMPATI MAHESH K, DONKER RILPHO LUDOVICUS, MITRY MARK JOSEPH, LI SHUQI, MCKENZIE PAUL A, URONE, DIEGO, M
Year of Publication 03.03.2023
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Year of Publication 03.03.2023
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