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Year of Publication 30.04.2024
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Year of Publication 23.09.2020
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Metrology slot plates
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Year of Publication 06.08.2024
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PLASMA SHOWERHEAD WITH IMPROVED UNIFORMITY
Doering, Kenneth Brian, Shah, Kartik, Griffin, Kevin, Chen, Hanhong, Zhang, Hao, Wang, Chaowei
Year of Publication 05.10.2023
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Year of Publication 05.10.2023
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PLASMA SHOWERHEAD WITH IMPROVED UNIFORMITY
ZHANG, Hao, DOERING, Kenneth Brian, WANG, Chaowei, GRIFFIN, Kevin, CHEN, Hanhong, SHAH, Kartik
Year of Publication 05.10.2023
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Year of Publication 05.10.2023
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METROLOGY SLOT PLATES
Doering, Kenneth Brian, Baluja, Sanjeev, Sampathkumar, Shrihari, Zhang, Chunlei, Shah, Vivek B, Agarwal, Ashutosh
Year of Publication 09.03.2023
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Year of Publication 09.03.2023
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METROLOGY SLOT PLATES
DOERING, Kenneth Brian, SHAH, Vivek B, BALUJA, Sanjeev, AGARWAL, Ashutosh, ZHANG, Chunlei, SAMPATHKUMAR, Shrihari
Year of Publication 09.03.2023
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Year of Publication 09.03.2023
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Thermally uniform deposition station
Doering, Kenneth Brian, Shah, Kartik, AuBuchon, Joseph, Baluja, Sanjeev, Lee, Jared Ahmad, Kashyap, Dhritiman Subha
Year of Publication 21.02.2023
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Year of Publication 21.02.2023
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