Formation of Low-Resistivity Nickel Silicide with High Temperature Stability from Atomic-Layer-Deposited Nickel Thin Film
Do, Kwan-Woo, Yang, Chung-Mo, Kang, Ik-Su, Kim, Kyung-Min, Back, Kyoung-Hum, Cho, Hyun-Ick, Lee, Heon-Bok, Kong, Sung-Ho, Hahm, Sung-Ho, Kwon, Dae-Hyuk, Lee, Jong-Hyun, Lee, Jung-Hee
Published in Japanese Journal of Applied Physics (01.04.2006)
Published in Japanese Journal of Applied Physics (01.04.2006)
Get full text
Journal Article
Semiconductor device having buried bit line and method for fabricating the same
Ji Yun-Hyuck, Do Kwan-Woo, Lee Seung-Mi, Kim Beom-Yong, Park Woo-Young
Year of Publication 30.08.2016
Get full text
Year of Publication 30.08.2016
Patent
Semiconductor device including carbon-containing electrode and method for fabricating the same
Do, Kwan-Woo, Lee, Kee-Jeung, Kim, Young-Dae, Lee, Mi-Hyoung, Lee, Jeong-Yeop
Year of Publication 27.11.2012
Get full text
Year of Publication 27.11.2012
Patent
Semiconductor device and method for fabricating the same
Do, Kwan-Woo, Roh, Jae-Sung, Lee, Kee-Jeung, Kil, Deok-Sin, Kim, Young-Dae, Kim, Jin-Hyock, Park, Kyung-Woong, Song, Han-Sang
Year of Publication 30.10.2012
Get full text
Year of Publication 30.10.2012
Patent
Method of forming noble metal layer using ozone reaction gas
Kil, Deok-Sin, Lee, Kee-Jeung, Kim, Young-Dae, Kim, Jin-Hyock, Do, Kwan-Woo, Park, Kyung-Woong, Lee, Jeong-Yeop, Kim, Ja-Yong
Year of Publication 16.10.2012
Get full text
Year of Publication 16.10.2012
Patent
Method of fabricating capacitor
Do, Kwan-Woo, Lee, Kee-Jeung, Kil, Deok-Sin, Kim, Young-Dae, Kim, Jin-Hyock, Park, Kyung-Woong, Lee, Jeong-Yeop
Year of Publication 03.04.2012
Get full text
Year of Publication 03.04.2012
Patent
Semiconductor device and method of fabricating the same
Lee, Kee-Jeung, Roh, Jae-Sung, Kil, Deok-Sin, Kim, Young-Dae, Kim, Jin-Hyock, Do, Kwan-Woo, Park, Kyung-Woong, Lee, Jeong-Yeop
Year of Publication 13.03.2012
Get full text
Year of Publication 13.03.2012
Patent
Method of fabricating capacitor in semiconductor device
Do, Kwan-Woo, Lee, Kee-Jeung, Kil, Deok-Sin, Kim, Young-Dae, Kim, Jin-Hyock, Park, Kyung-Woong, Lee, Jeong-Yeop
Year of Publication 11.10.2011
Get full text
Year of Publication 11.10.2011
Patent
Method for fabricating capacitor
Lee, Kee-Jeung, Roh, Jae-Sung, Yeom, Seung-Jin, Song, Han-Sang, Kil, Deok-Sin, Kim, Young-Dae, Kim, Jin-Hyock, Do, Kwan-Woo
Year of Publication 13.09.2011
Get full text
Year of Publication 13.09.2011
Patent
Method for fabricating capacitor in semiconductor device
Do, Kwan-Woo, Roh, Jae-Sung, Lee, Kee-Jeung, Kil, Deok-Sin, Kim, Young-Dae, Kim, Jin-Hyock, Park, Kyung-Woong
Year of Publication 19.10.2010
Get full text
Year of Publication 19.10.2010
Patent
Nickel Silicide Properties of Ni Thin Film Deposited Atomic Layer Deposition
Do, Kwan Woo, Kim, Kyoung Min, Back, Kyong Hum, Kang, Ik Su, Yang, Chung Mo, Cho, Hyun Ick, Lee, Heon Bok, Lee, Jong Hyun, Hahm, Sung Ho, Kong, Seong Ho, Lee, Jung Hee
Published in Meeting abstracts (Electrochemical Society) (17.02.2006)
Published in Meeting abstracts (Electrochemical Society) (17.02.2006)
Get full text
Journal Article