CORROSION-RESISTANT GROUND SHIELD FOR PROCESSING CHAMBER
LAKSHESWAR KALITA, HE XIAOMING, JENNIFER Y SUN, WU XIAOWEI, DMITRY LUBOMIRSKY, PARK SOO-NAM
Year of Publication 05.09.2023
Get full text
Year of Publication 05.09.2023
Patent
CERAMIC SHOWERHEADS WITH CONDUCTIVE ELECTRODES
LAKSHESWAR KALITA, LOKKEE LOH, TAN TIEN FAK, SARAVJEET SINGH, PARK SOO-NAM, DMITRY LUBOMIRSKY, KIM TAE WON
Year of Publication 06.06.2023
Get full text
Year of Publication 06.06.2023
Patent
WAFER PROCESSING EQUIPMENT HAVING EXPOSABLE SENSING LAYER
LEONARD TEDESCHI, OLIVIER JOUBERT, JI LILI, DMITRY LUBOMIRSKY, DANIEL MCCORMICK, PHILIP ALLAN KRAUS
Year of Publication 09.12.2021
Get full text
Year of Publication 09.12.2021
Patent
SYSTEM AND METHOD FOR PERFORMING RADIAL DIRECTION CONTROL AND AZIMUTH CONTROL ON PLASMA UNIFORMITY
TRAN TOAN, KOBAYASHI SATORU, NIKOLAI KALNIN, SUGAI HIDEO, PARK SOO-NAM, DMITRY LUBOMIRSKY
Year of Publication 26.08.2021
Get full text
Year of Publication 26.08.2021
Patent
SYSTEMS AND METHODS FOR IMPROVED SEMICONDUCTOR ETCHING AND COMPONENT PROTECTION
MARTIN YUE CHOI, TAN TIEN FAK, LOH LOK KEE, JUNG SOONWOOK, DMITRY LUBOMIRSKY, PARK SOO-NAM
Year of Publication 24.12.2020
Get full text
Year of Publication 24.12.2020
Patent
SYSTEMS AND PROCESSING FOR PLASMA FILTERING
NIKOLAI KALNIN, PARK SOO-NAM, TOAN Q TRAN, DMITRY LUBOMIRSKY, AKHIL DEVARAKONDA
Year of Publication 20.06.2019
Get full text
Year of Publication 20.06.2019
Patent
ROTATABLE SUBSTRATE SUPPORT HAVING HIGH FREQUENCY APPLICATOR
HANAWA KOJI, JASON A KENNEY, PARK SOONAM, DMITRY LUBOMIRSKY, KOBAYASHI OSAMU, KIRBY H FLOYD
Year of Publication 19.07.2018
Get full text
Year of Publication 19.07.2018
Patent