Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources
Korobochko, Vladimir, Bolshukhin, Denis, Dippmann, Lutz, Merz, Spencer, Von Bergmann, Hubertus, Kleinschmidt, Juergen
Year of Publication 04.07.2006
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Year of Publication 04.07.2006
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Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources
KLEINSCHMIDT JUERGEN, MERZ SPENCER, KOROBOCHKO VLADIMIR, VON BERGMANN HUBERTUS, BOLSHUKHIN DENIS, DIPPMANN LUTZ
Year of Publication 04.07.2006
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Year of Publication 04.07.2006
Patent
Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources
KLEINSCHMIDT JUERGEN, MERZ SPENCER, KOROBOCHKO VLADIMIR, BOLSHUKHIN DENIS, BERGMANN HUBERTUS V, DIPPMANN LUTZ
Year of Publication 15.09.2005
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Year of Publication 15.09.2005
Patent
Pulse electric current generating apparatus used in microchip manufacture, has capacitor bank comprised of two capacitors, for producing high voltage for discharge
KLEINSCHMIDT, JUERGEN, BOLSHUKHIN, DENIS, MERZ, SPENCER, DIPPMANN, LUTZ, BERGMANN, HUBERTUS VON, KOROBOCHKO, VLADIMIR
Year of Publication 28.07.2005
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Year of Publication 28.07.2005
Patent
Anordnung zur Erzeugung impulsförmiger Ströme hoher Repetitionsrate und hoher Stromstärke für gasentladungsgepumpte Strahlungsquellen
BERGMANN, HUBERTUS VON, DR, KLEINSCHMIDT, JUERGEN, BOLSHUKHIN, DENIS, MERZ, SPENCER, DIPPMANN, LUTZ, KOROBOCHKO, VLADIMIR
Year of Publication 11.04.2013
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Year of Publication 11.04.2013
Patent