Cobalt CMP Development for 7nm Logic Device
Wu, Changhong, Han, Ja-Hyung, Shi, Xingzhao, Koli, Dinesh R, Penigalapati, Dinesh
Published in ECS transactions (26.04.2017)
Published in ECS transactions (26.04.2017)
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Journal Article
Advanced Process Control for Variability Control in Chemical Mechanical Polishing Process
Koli, Dinesh R, Wan Hsiang Liang, Rachel, Kim, Hong Jin, Solan, Robert
Published in ECS transactions (28.07.2016)
Published in ECS transactions (28.07.2016)
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Journal Article
The Role of Polysilicon Slurry and Its Application in 7nm CMP
Chao, Tai Fong, Penigalapati, Dinesh, Yang, JI Chul, Huang, Haigou, Koli, Dinesh R
Published in ECS transactions (26.04.2017)
Published in ECS transactions (26.04.2017)
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Journal Article
CMP: Consideration of Stop-on Selectivity in Advanced Node Semiconductor Manufacturing Technology
Tsai, Stan, Amanapu, Hari, Xie, Ruilong, Zhang, John, Chung, Kisup, Labelle, Cathy, Huang, Haigou, Han, Ja-Hyung, Koli, Dinesh R, Surisetty, Charan
Published in ECS transactions (25.04.2017)
Published in ECS transactions (25.04.2017)
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Journal Article
Study on the Polishing Performance of Silicon Carbonitride (SiCN)
Qin, Liqiao, Gu, Sipeng, Kim, Hong Jin, Han, Ja-Hyung, Koli, Dinesh R
Published in ECS transactions (28.07.2016)
Published in ECS transactions (28.07.2016)
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Journal Article
The Role of Polysilicon Slurry and Its Application in 7nm CMP
Chao, Tai Fong, Penigalapati, Dinesh, Yang, JI Chul, Huang, Haigou, Koli, Dinesh R
Published in Meeting abstracts (Electrochemical Society) (15.04.2017)
Published in Meeting abstracts (Electrochemical Society) (15.04.2017)
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Journal Article
Cobalt CMP Development for 7nm Logic Device
Wu, Changhong, Han, Ja-Hyung, Shi, Xingzhao, Koli, Dinesh R, Penigalapati, Dinesh
Published in Meeting abstracts (Electrochemical Society) (15.04.2017)
Published in Meeting abstracts (Electrochemical Society) (15.04.2017)
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Journal Article
Initial Study on the Polishing Performance of Nitrogen-Doped Silicon Carbide (SiC)
Qin, Liqiao, Gu, Sipeng, Kim, Hong Jin, Han, Ja-Hyung, Koli, Dinesh R
Published in Meeting abstracts (Electrochemical Society) (01.04.2016)
Published in Meeting abstracts (Electrochemical Society) (01.04.2016)
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Journal Article
Damascene Copper Plating Recipe Engineering for Defectivity, Health of Line (HOL) and Reliability Improvement
Ahmed, Shafaat, Huang, Qiang, Cheng, Tien Jen, Findeis, Paul, Koli, Dinesh R, Troung, Connie Nga, Grunow, Stephan
Published in Meeting abstracts (Electrochemical Society) (01.09.2016)
Published in Meeting abstracts (Electrochemical Society) (01.09.2016)
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Journal Article
GIMBAL FOR CMP TOOL CONDITIONING DISK HAVING FLEXIBLE METAL DIAPHRAGM
Vincent Eddy, Aldrin Bernard Anak, Koli, Dinesh R, Jung, Sung Pyo, Bodensieck, Eric J, Lee, Sunghoon
Year of Publication 19.09.2019
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Year of Publication 19.09.2019
Patent
COBALT PLATED VIA INTEGRATION SCHEME
SHU, Jiehui, KOLI, Dinesh R, AHMED, Shafaat, SUN, Zhiguo, FANG, Qiang, TSENG, Wei-Tsu
Year of Publication 04.07.2019
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Year of Publication 04.07.2019
Patent
Cobalt plated via integration scheme
Koli, Dinesh R, Ahmed, Shafaat, Fang, Qiang, Shu, Jiehui, Sun, Zhiguo, Tseng, Wei-Tsu
Year of Publication 02.07.2019
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Year of Publication 02.07.2019
Patent
CMP: Consideration of Stop-on Selectivity in Advanced Node Semiconductor Manufacturing Technology
Tsai, Stan, Amanapu, Hari, Xie, Ruilong, Zhang, John, Chung, Kisup, Labelle, Cathy, Huang, Haigou, Han, Ja-Hyung, Koli, Dinesh R, Surisetty, Charan
Published in Meeting abstracts (Electrochemical Society) (15.04.2017)
Published in Meeting abstracts (Electrochemical Society) (15.04.2017)
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Journal Article
Method of forming cobalt contact module and cobalt contact module formed thereby
Koli, Dinesh R, Wu, Changhong, Huang, Haigou, Ahmed, Shafaat, Fang, Qiang
Year of Publication 16.04.2019
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Year of Publication 16.04.2019
Patent
METHOD OF FORMING COBALT CONTACT MODULE AND COBALT CONTACT MODULE FORMED THEREBY
Koli, Dinesh R, Wu, Changhong, Huang, Haigou, Ahmed, Shafaat, Fang, Qiang
Year of Publication 31.01.2019
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Year of Publication 31.01.2019
Patent
Method of forming cobalt contact module and cobalt contact module formed thereby
HUANG, HAIGOU, WU, CHANG-HONG, FANG, QIANG, AHMED, SHAFAAT, KOLI, DINESH R
Year of Publication 11.09.2020
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Year of Publication 11.09.2020
Patent
Cobalt plated via integration scheme
TSENG, WEI TSU, SHU, JIEHUI, FANG, QIANG, AHMED, SHAFAAT, SUN, ZHIGUO, KOLI, DINESH R
Year of Publication 11.04.2020
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Year of Publication 11.04.2020
Patent
Cobalt plated via integration scheme
SHU, JIE-HUI, SUN, ZHI-GUO, TSENG, WEI-TSU, FANG, QIANG, AHMED, SHAFAAT, KOLI, DINESH R
Year of Publication 01.08.2019
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Year of Publication 01.08.2019
Patent