Search Results - "DILLEN HERMANUS A" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

MEASUREMENT METHOD AND RELATED DEVICE

MEASUREMENT METHOD AND RELATED DEVICE

by HUISMAN THOMAS JORIS, MAAS REINIER C, DILLEN HERMANUS A
Year of Publication 08.08.2023

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Patent

CHARGED PARTICLE BEAM APPARATUS WITH BEAM TILT AND METHOD THEREOF

CHARGED PARTICLE BEAM APPARATUS WITH BEAM TILT AND METHOD THEREOF

by REN WEIMING, LIU XUEDONG, HOKE SHAHDUL, JI XIAOYU, DILLEN HERMANUS A
Year of Publication 08.08.2023

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Patent

Target structure and associated method and apparatus

Target structure and associated method and apparatus

by DECKERS DAVID FRANS SIMON, WERKMAN ROY, TEL WIM TJIBBO, DILLEN HERMANUS A
Year of Publication 02.06.2023

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Patent

METHODS AND APPARATUS FOR ESTIMATING SUBSTRATE SHAPE

METHODS AND APPARATUS FOR ESTIMATING SUBSTRATE SHAPE

by DILLEN HERMANUS ADRIANUS, PLUG REINDER T
Year of Publication 22.10.2021

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Patent

Method of metrology and associated apparatuses

Method of metrology and associated apparatuses

by MAAS, RUBEN CORNELIS, DILLEN, HERMANUS ADRIANUS, HUISMAN, THOMAS JARIK
Year of Publication 21.03.2024

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Patent

기판 형상을 추정하기 위한 방법 및 장치

기판 형상을 추정하기 위한 방법 및 장치

by DILLEN HERMANUS ADRIANUS, PLUG REINDER TEUN
Year of Publication 13.10.2021

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Patent

Aligning distorted images

Aligning distorted images

by HUISMAN THOMAS, DILLEN HERMANUS ADRIANUS, VAN MIERLE, WILLEM, L, VAN RENS JOHN FRANCISCUS MARIA
Year of Publication 21.06.2024

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Patent

System and method for inspection by classification and identification of fault mechanisms in charged particle systems

System and method for inspection by classification and identification of fault mechanisms in charged particle systems

by WASNEL, ANDREAS, DILLEN HERMANUS ADRIANUS, NIKOLSKY PAVEL, CORRADI, ANGELO, SUNG YEON-AH, SONG YOUNG-HUN
Year of Publication 30.04.2024

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Patent

하전 입자 시스템의 실패 메커니즘 분류 및 식별에 의한 검사 시스템 및 방법

하전 입자 시스템의 실패 메커니즘 분류 및 식별에 의한 검사 시스템 및 방법

by CORRADI ANTONIO, DILLEN HERMANUS ADRIANUS, WOESSNER ACHIM, NIKOLSKI PIOTER, SONG YOUNGHOON, SUNG YUN A
Year of Publication 30.04.2024

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Patent

METHOD OF METROLOGY AND ASSOCIATED APPARATUSES

METHOD OF METROLOGY AND ASSOCIATED APPARATUSES

by HUISMAN THOMAS, MAAS RUBEN, DILLEN HERMANUS
Year of Publication 03.11.2020

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Patent

Methods and apparatus for estimating substrate shape

Methods and apparatus for estimating substrate shape

by DILLEN, HERMANUS ADRIANUS, PLUG, REINDER TEUN
Year of Publication 01.11.2020

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Patent

Method of metrology and associated apparatuses

Method of metrology and associated apparatuses

by MAAS, RUBEN CORNELIS, DILLEN, HERMANUS ADRIANUS, HUISMAN, THOMAS JARIK
Year of Publication 16.06.2022

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Patent

Charged-particle beam apparatus with beam-tilt and methods thereof

Charged-particle beam apparatus with beam-tilt and methods thereof

by REN, WEI-MING, HOQUE, SHAHEDUL, LIU, XUEDONG, DILLEN, HERMANUS ADRIANUS, JI, XIAO-YU
Year of Publication 01.01.2024

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Patent

Method of metrology and associated apparatuses

Method of metrology and associated apparatuses

by MAAS, RUBEN CORNELIS, DILLEN, HERMANUS ADRIANUS, HUISMAN, THOMAS JARIK
Year of Publication 21.03.2022

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Patent

Method of determining a distortion component of a substrate

Method of determining a distortion component of a substrate

by WERKMAN, ROY, KEA, MARC JURIAN, DILLEN, HERMANUS ADRIANUS, TEL, WIM TJIBBO, KOU, WEITIAN
Year of Publication 11.12.2023

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Patent

Charged-particle beam apparatus with beam-tilt and methods thereof

Charged-particle beam apparatus with beam-tilt and methods thereof

by REN, WEIMING, HOQUE, SHAHEDUL, LIU, XUEDONG, DILLEN, HERMANUS ADRIANUS, JI, XIAOYU
Year of Publication 01.10.2023

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Patent

Aligning a distorted image

Aligning a distorted image

by VAN MIERLO, WILLEM LOUIS, DILLEN, HERMANUS ADRIANUS, HUISMAN, THOMAS JARIK, VAN RENS, JASPER FRANS MATHIJS
Year of Publication 01.09.2023

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Patent

Method of monitoring lithographic process and associated apparatus

Method of monitoring lithographic process and associated apparatus

by VAN LAARHOVEN, HENRICUS, A, VERMA ANSHU, DILLEN HERMANUS ADRIANUS, VAN DER SANDEN STEFAN CORNELIS THEODORUS, ANUNCIADO, RAFAEL
Year of Publication 22.08.2023

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Patent

Method and system for calibrating a scanning electron microscope

Method and system for calibrating a scanning electron microscope

by VAN MIERLO, WILLEM LOUIS, DILLEN, HERMANUS ADRIANUS, TEL, WIM TJIBBO
Year of Publication 01.11.2021

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Patent

리소그래피 공정을 모니터링하는 방법 및 관련된 장치

리소그래피 공정을 모니터링하는 방법 및 관련된 장치

by DILLEN HERMANUS ADRIANUS, DE ATHAYDE COSTA E SILVA MARSIL, VAN WIJK ROBERT JAN, BASTANI VAHID, ZHANG YICHEN
Year of Publication 30.04.2024

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Patent