Search Results - "DIETZ FRANKLIN ROY" :: K.UTB vyhledávací portál

Method of thin film process control and calibration standard for optical profilometry step height measurement

by Coult, David Gerald, Derkits, Jr., Gustav Edward, Dietz, Franklin Roy, Muthiah, Ranjani C, Radelow, Sonja
Year of Publication 03.12.2002

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Detecting trace levels of copper

by DERKITS; GUSTAV EDWARD, ANTOL; JOZE E, COULT; DAVID GERALD, DIETZ; FRANKLIN ROY, SELAMOGLU; NUR
Year of Publication 14.11.2000

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Method of thin film process control and calibration standard for optical profilometry step height measurement

by DIETZ FRANKLIN ROY, RADELOW SONJA, DERKITS, JR. GUSTAV EDWARD, COULT DAVID GERALD, MUTHIAH RANJANI C
Year of Publication 03.12.2002

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In-situ automated contactless thickness measurement for wafer thinning

by Coult, David Gerald, Wendling, Duane Donald, Lentz, Charles William, Segner, Bryan Phillip, Derkits, Gustav Edward, Wu, Wan-ning, Dietz, Franklin Roy
Year of Publication 20.08.2002

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In-situ automated contactless thickness measurement for wafer thinning

by SEGNER BRYAN PHILLIP, DIETZ FRANKLIN ROY, WU WAN-NING, LENTZ CHARLES WILLIAM, DERKITS GUSTAV EDWARD, WENDLING DUANE DONALD, COULT DAVID GERALD
Year of Publication 20.08.2002

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Patent

Method of thin film process control and calibration standard for optical profilometry step height measurement

Detecting trace levels of copper

Method of thin film process control and calibration standard for optical profilometry step height measurement

In-situ automated contactless thickness measurement for wafer thinning

In-situ automated contactless thickness measurement for wafer thinning

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