DROPLET GENERATOR NOZZLE
Buis, Edwin Johan, Sams, Benjamin Andrew, Driessen, Theodorus Wilhelmus, Trees, Dietmar Uwe Herbert, Johnson, Brandon Michael
Year of Publication 17.11.2022
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Year of Publication 17.11.2022
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ROBUST FLUID COUPLING APPARATUS
Kincal, Serkan, Sams, Benjamin Andrew, Driessen, Theodorus Wilhelmus, Ershov, Alexander Igorevich, Trees, Dietmar Uwe Herbert, Telkar, Vikas Giridhar
Year of Publication 07.09.2023
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Year of Publication 07.09.2023
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DROPLET GENERATOR NOZZLE
TREES, Dietmar, Uwe, Herbert, BUIS, Edwin, Johan, DRIESSEN, Theodorus, Wilhelmus, JOHNSON, Brandon, Michael, SAMS, Benjamin, Andrew
Year of Publication 24.08.2022
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Year of Publication 24.08.2022
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HYBRID DROPLET GENERATOR FOR EXTREME ULTRAVIOLET LIGHT SOURCES IN LITHOGRAPHIC RADIATION SYSTEMS
Sams, Benjamin Andrew, Borggreve, Herman Harry, Driessen, Theodorus Wilhelmus, Trees, Dietmar Uwe Herbert, Johnson, Brandon Michael, Telkar, Vikas Giridhar
Year of Publication 01.06.2023
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Year of Publication 01.06.2023
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HYBRID DROPLET GENERATOR FOR EXTREME ULTRAVIOLET LIGHT SOURCES IN LITHOGRAPHIC RADIATION SYSTEMS
TELKAR, Vikas, Giridhar, TREES, Dietmar, Uwe, Herbert, BORGGREVE, Herman, Harry, DRIESSEN, Theodorus, Wilhelmus, JOHNSON, Brandon, Michael, SAMS, Benjamin, Andrew
Year of Publication 29.03.2023
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Year of Publication 29.03.2023
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APPARATUS FOR CONTROLLING INTRODUCTION OF EUV TARGET MATERIAL INTO AN EUV CHAMBER
BENJAMIN ANDREW SAMS, DIETMAR UWE HERBERT TREES, GEORGIY O. VASCHENKO
Year of Publication 10.07.2020
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Year of Publication 10.07.2020
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APPARATUS FOR AND METHOD OF ACCELERATING DROPLETS IN A DROPLET GENERATOR FOR AN EUV SOURCE
Rajyaguru, Chirag, Vaschenko, Georgiy Olegovich, Rafac, Robert Jay, Lukens, Joshua Mark, Driessen, Theodorus Wilhelmus, Ershov, Alexander Igorevich, Trees, Dietmar Uwe Herbert
Year of Publication 25.05.2023
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Year of Publication 25.05.2023
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HIGH PRESSURE AND VACUUM LEVEL SENSOR IN METROLOGY RADIATION SYSTEMS
CAVALIER, Grant, Steven, TREES, Dietmar, Uwe, Herbert, ATENCIO, Edgardo, Zamora, RAI, Sandeep, TEDROW, Jon, David, DRIESSEN, Theodorus, Wilhelmus, JOHNSON, Brandon, Michael, SAMS, Benjamin, Andrew, SWERDLOW, Ethan, Marcus, BESSEMS, David
Year of Publication 05.04.2023
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Year of Publication 05.04.2023
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Target supply apparatus
BUIS, EDWIN JOHAN, DRIESSEN, THEODORUS WILHELMUS, TREES, DIETMAR UWE HERBERT, ROLLINGER, BOB, VASCHENKO, GEORGIY OLEGOVICH, LUKENS, JOSHUA MARK
Year of Publication 01.04.2023
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Year of Publication 01.04.2023
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Droplet generator nozzle
BUIS, EDWIN JOHAN, DRIESSEN, THEODORUS WILHELMUS, SAMS, BENJAMIN ANDREW, TREES, DIETMAR UWE HERBERT, JOHNSON, BRANDON MICHAEL
Year of Publication 01.08.2021
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Year of Publication 01.08.2021
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