LIFT ASSEMBLIES, AND RELATED METHODS AND COMPONENTS, FOR SUBSTRATE PROCESSING CHAMBERS
SALINAS, Martin Jeffrey, DHAMODHARAN, Raja Murali, LAU, Shu-Kwan, PATIL, Aniketnitin
Year of Publication 20.06.2024
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Year of Publication 20.06.2024
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LIFT ASSEMBLIES, AND RELATED METHODS AND COMPONENTS, FOR SUBSTRATE PROCESSING CHAMBERS
SALINAS, Martin Jeffrey, DHAMODHARAN, Raja Murali, LAU, Shu-Kwan, PATIL, Aniketnitin
Year of Publication 20.06.2024
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Year of Publication 20.06.2024
Patent
AIR SHROUDS WITH INTEGRATED HEAT EXCHANGER
NELLIKKA, Shainish, DHAMODHARAN, Raja Murali, RAMACHANDRAN, Vinodh, LAU, Shu-Kwan, PALATY, Abraham, WANG, Danny
Year of Publication 02.11.2023
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Year of Publication 02.11.2023
Patent
AIR SHROUDS WITH INTEGRATED HEAT EXCHANGER
NELLIKKA, Shainish, DHAMODHARAN, Raja Murali, RAMACHANDRAN, Vinodh, LAU, Shu-Kwan, WANG, Danny D, PALATY, Abraham
Year of Publication 26.10.2023
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Year of Publication 26.10.2023
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BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCTURES FOR EPITAXIAL DEPOSITION OPERATIONS
SALINAS, Martin Jeffrey, MORADIAN, Ala, GHAZAL, Peydaye Saheli, DHAMODHARAN, Raja Murali, SUBBANNA, Manjunath, LAU, Shu-Kwan, PATIL, Aniketnitin, SANCHEZ, Errol Antonio C, ZHU, Zuoming
Year of Publication 18.01.2024
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Year of Publication 18.01.2024
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BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCTURES FOR EPITAXIAL DEPOSITION OPERATIONS
SALINAS, Martin Jeffrey, MORADIAN, Ala, GHAZAL, Peydaye Saheli, DHAMODHARAN, Raja Murali, SUBBANNA, Manjunath, LAU, Shu-Kwan, PATIL, Aniketnitin, SANCHEZ, Errol Antonio C, ZHU, Zuoming
Year of Publication 18.01.2024
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Year of Publication 18.01.2024
Patent
Air shrouds with integrated heat exchanger
DHAMODHARAN, RAJA MURALI, LAU, SHU-KWAN, PALATY, ABRAHAM, WANG, DANNY D, RAMACHANDRAN, VINODH, NELLIKKA, SHAINISH
Year of Publication 01.02.2024
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Year of Publication 01.02.2024
Patent
Batch processing apparatus, systems, and related methods and structures for epitaxial deposition operations
DHAMODHARAN, RAJA MURALI, SALINAS, MARTIN JEFFREY, LAU, SHU-KWAN, PATIL, ANIKETNITIN, SANCHEZ, ERROL ANTONIO C, ZHU, ZUOMING, MORADIAN, ALA, SUBBANNA, MANJUNATH, GHAZAL, PEYDAYE SAHELI
Year of Publication 16.01.2024
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Year of Publication 16.01.2024
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