Estimation of fixed charge densities in hafnium-silicate gate dielectrics
Kaushik, V.S., O'Sullivan, B.J., Pourtois, G., Van Hoornick, N., Delabie, A., Van Elshocht, S., Deweerd, W., Schram, T., Pantisano, L., Rohr, E., Ragnarsson, L.-A., De Gendt, S., Heyns, M.
Published in IEEE transactions on electron devices (01.10.2006)
Published in IEEE transactions on electron devices (01.10.2006)
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Journal Article
Electrical and physical characterization of remote plasma oxidized HfO2 gate dielectrics
YAMAMOTO, Kazuhiko, DEWEERD, Wim, AOULAICHE, Marc, HOUSSA, Michel, DE GENDT, Stefan, HORII, Sadayoshi, ASAI, Masayuki, SANO, Atsushi, HAYASHI, Shigenori, NIWA, Masaaki
Published in IEEE transactions on electron devices (01.05.2006)
Published in IEEE transactions on electron devices (01.05.2006)
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Journal Article