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반도체 제조를 위해 절대 참조물을 통해 오버레이 결과물을 제조하기 위한 방법
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DEVILLIERS ANTON J
Year of Publication
20.04.2023
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반도체 제조를 위해 절대 참조물을 통해 오버레이 결과물을 제조하기 위한 방법
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DEVILLIERS ANTON J
Year of Publication
20.04.2023
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가변 파장 투시 층 적층물
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DEVILLIERS ANTON J
Year of Publication
20.04.2023
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필드 스티칭을 위한 패턴 정렬 방법
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DEVILLIERS ANTON J
Year of Publication
14.04.2023
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기판 패터닝
by
GRZESKOWIAK JODI
,
DEVILLIERS ANTON J
,
SCHEPIS ANTHONY
Year of Publication
24.05.2022
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복수의 물질들을 가진 층을 사용하여 기판을 패터닝하는 방법
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DEVILLIERS ANTON J
Year of Publication
23.11.2018
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METHOD FOR CHEMICAL POLISHING AND PLANARIZATION
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DEVILLIERS ANTON J
Year of Publication
02.11.2018
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플라즈마 처리 시스템 내의 온도 제어를 위한 시스템 및 방법
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DEVILLIERS ANTON J
Year of Publication
31.10.2018
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분해능이하 기판 패터닝을 위한 에칭 마스크를 형성하는 방법
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DEVILLIERS ANTON J
Year of Publication
29.06.2018
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극자외선 리소그래피를 사용하여 기판을 패터닝하기 위한 방법
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DEVILLIERS ANTON J
Year of Publication
14.05.2018
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분해능이하 기판 패터닝을 위한 에칭 마스크를 형성하는 방법
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DEVILLIERS ANTON J
Year of Publication
10.05.2018
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분해능이하 기판 패터닝을 위한 에칭 마스크를 형성하는 방법
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DEVILLIERS ANTON J
Year of Publication
04.05.2018
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동축 투시 정렬 이미징 시스템
by
SCHEPIS ANTHONY R
,
DEVILLIERS ANTON J
,
CONKLIN DAVID
Year of Publication
20.04.2023
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동축 투시 검사 시스템
by
SCHEPIS ANTHONY R
,
DEVILLIERS ANTON J
,
CONKLIN DAVID
Year of Publication
20.04.2023
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기판 패터닝을 위한 마스크를 형성하는 방법
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DEVILLIERS ANTON J
Year of Publication
02.02.2018
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반도체 소자의 모놀리식 3D 집적을 위한 아키텍처
by
DEVILLIERS ANTON J
,
LIEBMANN LARS
,
SMITH JEFFREY
Year of Publication
09.06.2021
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기판을 평탄화하기 위한 시스템 및 방법
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DEVILLIERS ANTON J
Year of Publication
12.12.2017
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SUBSTRATE TUNING SYSTEM AND METHOD USING OPTICAL PROJECTION
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DEVILLIERS ANTON J
Year of Publication
28.06.2017
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다중 재료를 갖는 층을 사용하여 기판을 패터닝하는 방법
by
DEVILLIERS ANTON J
,
MOHANTY NIHAR
Year of Publication
03.01.2019
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NEGATIVE TONE DEVELOPER COMPATIBLE PHOTORESIST COMPOSITION AND METHODS OF USE
by
DEVILLIERS ANTON J
Year of Publication
15.03.2017
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