Wafer handling apparatus and method of manufacturing thereof
Mariner, John Thomas, Hejl, Timothy J, Longworth, Douglas Alan, Lennartz, Jeffrey, Sane, Ajit, Macey, Andrew John, Leist, Jon, Devan, Thomas E
Year of Publication 29.04.2008
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Year of Publication 29.04.2008
Patent
Wafer handling apparatus and method of manufacturing thereof
HEJL TIMOTHY J, LONGWORTH DOUGLAS ALAN, LENNARTZ JEFFREY, DEVAN THOMAS E, LEIST JON, SANE AJIT, MACEY ANDREW JOHN, MARINER JOHN THOMAS
Year of Publication 29.04.2008
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Year of Publication 29.04.2008
Patent
COMPOSITE REFRACTORY METAL CARBIDE COATING ON A SUBSTRATE AND METHOD FOR MAKING THEREOF
LENNARTZ JEFFREY, HEJL TIMOTHY, DEVAN THOMAS, LEIST JON, SANE AJIT, KOTABISH DANIEL, MACEY ANDREW, MARINER JOHN, LONGWORTH DOUGLAS
Year of Publication 02.06.2006
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Year of Publication 02.06.2006
Patent
Composite refractory metal carbide coating on a substrate and method for making thereof
LENNARTZ JEFFREY, HEJL TIMOTHY, DEVAN THOMAS, LEIST JON, SANE AJIT, KOTABISH DANIEL, MACEY ANDREW, MARINER JOHN, LONGWORTH DOUGLAS
Year of Publication 24.03.2005
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Year of Publication 24.03.2005
Patent