Direct LIGA service for prototyping : status report
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Conference Proceeding
Journal Article
Fabrication of ultra thick, ultra high aspect ratio microcomponents by deep and ultra deep X-ray lithography
Jian, L., Loechel, B., Scheunemann, H.-U., Bednarzik, M., Desta, Y.M., Goettert, J.
Published in Proceedings International Conference on MEMS, NANO and Smart Systems (2003)
Published in Proceedings International Conference on MEMS, NANO and Smart Systems (2003)
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Conference Proceeding