Method and apparatus for ionized physical vapor deposition
REYNOLDS, GLYN, VUKOVIC, MIRKO, BRCKA, JOZEF, RUSSELL, DERREK ANDREW, DREWERY, JOHN STEPHEN
Year of Publication 21.03.2002
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Year of Publication 21.03.2002
Patent
Method and apparatus for ionized physical vapor deposition
MIRKO VUKOVIC, JOZEF BRCKA, MICHAEL JAMES GRAPPERHAUS, BRUCE DAVID GITTELMAN, GLYN REYNOLDS, DERREK ANDREW RUSSELL, FRANK MICHAEL CERIO JR
Year of Publication 30.05.2001
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Year of Publication 30.05.2001
Patent