Lithographic apparatus and device manufacturing method
STRAAIJER ALEXANDER, DERKSEN ANTONIUS THEODORUS ANN, STREEFKERK BOB, LOF JOERI, SIMON KLAUS
Year of Publication 09.02.2005
Get full text
Year of Publication 09.02.2005
Patent
Lithographic apparatus and device manufacturing method
STRAAIJER ALEXANDER, DERKSEN ANTONIUS THEODORUS ANN, STREEFKERK BOB, LOF JOERI, SIMON KLAUS
Year of Publication 01.12.2010
Get full text
Year of Publication 01.12.2010
Patent
Immersion lithographic apparatus and device manufacturing method
LOOPSTRA ERIK ROELOF, STRAAIJER ALEXANDER, SENGERS TIMOTHEUS FRANCISCUS, MULKENS JOHANNES CATHARINUS HU, DERKSEN ANTONIUS THEODORUS ANN, MERTENS JEROEN JOHANNES SOPHIA, HOOGENDAM CHRISTIAAN ALEXANDER, DONDERS SJOERD NICOLAAS LAMBER, STREEFKERK BOB, LOF JOERI
Year of Publication 24.07.2013
Get full text
Year of Publication 24.07.2013
Patent
Immersion lithographic apparatus and device manufacturing method
LOOPSTRA ERIK ROELOF, SENGERS TIMOTHEUS FRANCISCUS, STRAAIJER ALEXANDER, MULKENS JOHANNES CATHARINUS HU, DERKSEN ANTONIUS THEODORUS ANN, MERTENS JEROEN JOHANNES SOPHIA, HOOGENDAM CHRISTIAAN ALEXANDER, DONDERS SJOERD NICOLAAS LAMBER, STREEFKERK BOB, LOF JOERI
Year of Publication 01.12.2010
Get full text
Year of Publication 01.12.2010
Patent
Lithographic projection apparatus
STRAAIJER ALEXANDER, MODDERMAN THEODORUS MARINUS, RITSEMA ROELOF AEILKO SIEBRAND, DERKSEN ANTONIUS THEODORUS ANN, VAN SANTEN HELMAR, HOOGENDAM CHRISTIAAN ALEXANDER, STREEFKERK BOB, SIMON KLAUS, LOOPSTRA ERIK ROELOF, MULKENS JOHANNES CATHARINUS HU, KOLESNYCHENKO ALEKSEY, DE SMIT JOANNES THEODOOR, LOF JOERI
Year of Publication 12.01.2011
Get full text
Year of Publication 12.01.2011
Patent