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LOW-K DIELECTRIC DAMAGE REPAIR BY VAPOR-PHASE CHEMICAL EXPOSURE

LOW-K DIELECTRIC DAMAGE REPAIR BY VAPOR-PHASE CHEMICAL EXPOSURE

by KELVIN CHAN, DEMOS ALEXANDROS T
Year of Publication 18.01.2018

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Patent

UV-ASSISTED REMOVAL OF METAL OXIDES IN AN AMMONIA-CONTAINING ATMOSPHERE

UV-ASSISTED REMOVAL OF METAL OXIDES IN AN AMMONIA-CONTAINING ATMOSPHERE

by CHAN KELVIN, DEMOS ALEXANDROS T
Year of Publication 20.11.2015

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Patent

K LOW-K DIELECTRIC LAYER WITH REDUCED DIELECTRIC CONSTANT AND STRENGTHENED MECHANICAL PROPERTIES

K LOW-K DIELECTRIC LAYER WITH REDUCED DIELECTRIC CONSTANT AND STRENGTHENED MECHANICAL PROPERTIES

by KIM TAEWAN, YIM KANG SUB, DEMOS ALEXANDROS T
Year of Publication 25.10.2016

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Patent

UV-ASSISTED PHOTOCHEMICAL VAPOR DEPOSITION FOR DAMAGED LOW K FILMS PORE SEALING

UV-ASSISTED PHOTOCHEMICAL VAPOR DEPOSITION FOR DAMAGED LOW K FILMS PORE SEALING

by XIE BO, CHAN KELVIN, DEMOS ALEXANDROS T
Year of Publication 08.08.2016

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Patent

측벽 공극 밀봉 및 비아 청결을 위한 상호접속부 집적

측벽 공극 밀봉 및 비아 청결을 위한 상호접속부 집적

by KUMAR BHASKAR, DASH PRIYANKA, NAIK MEHUL B, REN HE, PADHI DEENESH, DEMOS ALEXANDROS T
Year of Publication 06.02.2018

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Patent

ADHESION LAYER TO MINIMIZE DILELECTRIC CONSTANT INCREASE WITH GOOD ADHESION STRENGTH IN A PECVD PROCESS

ADHESION LAYER TO MINIMIZE DILELECTRIC CONSTANT INCREASE WITH GOOD ADHESION STRENGTH IN A PECVD PROCESS

by NGO SURE, YIM KANG SUB, ARDALAN PENDAR, DEMOS ALEXANDROS T
Year of Publication 24.11.2015

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Patent

POST TREATMENT FOR DIELECTRIC CONSTANT REDUCTION WITH PORE GENERATION ON LOW K DIELECTRIC FILMS

POST TREATMENT FOR DIELECTRIC CONSTANT REDUCTION WITH PORE GENERATION ON LOW K DIELECTRIC FILMS

by NGO SURE, YIM KANG SUB, ARDALAN PENDAR, DEMOS ALEXANDROS T
Year of Publication 20.11.2015

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Patent

UV CURING PROCESS TO IMPROVE MECHANICAL STRENGTH AND THROUGHPUT ON LOW-K DIELECTRIC FILMS

UV CURING PROCESS TO IMPROVE MECHANICAL STRENGTH AND THROUGHPUT ON LOW-K DIELECTRIC FILMS

by YIM KANG SUB, CHHABRA MAHENDRA, DEMOS ALEXANDROS T
Year of Publication 18.11.2015

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Patent

알루미늄 질화물 배리어 층

알루미늄 질화물 배리어 층

by KUMAR BHASKAR, DASH PRIYANKA, GUGGILLA SRINIVAS, REN HE, PADHI DEENESH, DEMOS ALEXANDROS T
Year of Publication 01.11.2017

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Patent

NEW LOW-K FILMS WITH ENHANCED CROSSLINKING BY UV CURING

NEW LOW-K FILMS WITH ENHANCED CROSSLINKING BY UV CURING

by KIM TAE WAN, YIM, KANG SUB, DEMOS ALEXANDROS T
Year of Publication 15.10.2015

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Patent

ULTRA-THIN DIELECTRIC DIFFUSION BARRIER AND ETCH STOP LAYER FOR ADVANCED INTERCONNECT APPLICATIONS

ULTRA-THIN DIELECTRIC DIFFUSION BARRIER AND ETCH STOP LAYER FOR ADVANCED INTERCONNECT APPLICATIONS

by CHAN KELVIN, CHEN YIHONG, PADHI DEENESH, MALLICK ABHIJIT BASU, DEMOS ALEXANDROS T, SRINIVASAN MUKUND
Year of Publication 23.08.2017

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Patent

ULTRA LOW DIELECTRIC MATERIALS USING HYBRID PRECURSORS CONTAINING SILICON WITH ORGANIC FUNCTIONAL GROUPS BY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

ULTRA LOW DIELECTRIC MATERIALS USING HYBRID PRECURSORS CONTAINING SILICON WITH ORGANIC FUNCTIONAL GROUPS BY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

by YIM, KANG SUB, DEMOS ALEXANDROS T
Year of Publication 29.04.2013

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Patent

MULTI-LAYER DIELECTRIC STACK FOR PLASMA DAMAGE PROTECTION

MULTI-LAYER DIELECTRIC STACK FOR PLASMA DAMAGE PROTECTION

by NGO SURE, KIM TAEWAN, XIE BO, PAN CHENG, YIM KANG SUB, DEMOS ALEXANDROS T
Year of Publication 21.06.2017

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Patent

UV METHOD AND HARDWARE FOR CLEANING UV CHAMBERS

UV METHOD AND HARDWARE FOR CLEANING UV CHAMBERS

by NOWAK THOMAS, ROCHA ALVAREZ JUAN CARLOS, CHAN KELVIN, HENDRICKSON SCOTT A, XIE BO, BALUJA SANJEEV, TUREVSKY INNA, YAO DAPING, RAJ DAEMIAN, KANGUDE ABHIJIT, DEMOS ALEXANDROS T, CHHABRA MAHENDRA
Year of Publication 26.02.2020

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Patent

SELECTIVE SEALANT REMOVAL

SELECTIVE SEALANT REMOVAL

by KUMAR BHASKAR, CHAKRABORTY TAPASH, VISSER ROBERT JAN, PADHI DEENESH, BAJAJ GEETIKA, DEMOS ALEXANDROS T
Year of Publication 22.06.2016

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Patent

METHOD AND APPARATUS FOR MODULATING WAFER TREATMENT PROFILE IN UV CHAMBER

by ROCHA ALVAREZ JUAN CARLOS, BALUJA SANJEEV, DEMOS ALEXANDROS T
Year of Publication 26.12.2013

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Patent

ENHANCEMENT OF MODULUS AND HARDNESS FOR UV-CURED ULTRA LOW-K DIELECTRIC FILMS

ENHANCEMENT OF MODULUS AND HARDNESS FOR UV-CURED ULTRA LOW-K DIELECTRIC FILMS

by CHAN KELVIN, DASH PRIYANKA, YIM, KANG SUB, CHHABRA MAHENDRA, DEMOS ALEXANDROS T
Year of Publication 29.01.2016

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Patent

PROCESS FOR LOWERING ADHESION LAYER THICKNESS AND IMPROVING DAMAGE RESISTANCE FOR THIN ULTRA LOW-K DIELECTRIC FILM

PROCESS FOR LOWERING ADHESION LAYER THICKNESS AND IMPROVING DAMAGE RESISTANCE FOR THIN ULTRA LOW-K DIELECTRIC FILM

by YIM, KANG SUB, CHHABRA MAHENDRA, DEMOS ALEXANDROS T
Year of Publication 14.11.2013

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Patent

NOVEL SILICON PRECURSORS TO MAKE ULTRA LOW-K FILMS WITH HIGH MECHANICAL PROPERTIES BY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

NOVEL SILICON PRECURSORS TO MAKE ULTRA LOW-K FILMS WITH HIGH MECHANICAL PROPERTIES BY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

by YIM, KANG SUB, DEMOS ALEXANDROS T
Year of Publication 18.05.2011

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Patent

Low-Temperature Selective Si:As Epitaxy

Low-Temperature Selective Si:As Epitaxy

by Abdula, Daner, Chiu, YuJen, Marozas, Brendan, Khazaka, Rami, Miskin, Caleb K, Lee, Jung Soo, Demos, Alexandros T
Published in ECS transactions (27.09.2024)

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