METHOD OF OBTAINING MEASUREMENTS APPARATUS FOR PERFORMING A PROCESS STEP AND METROLOGY APPARATUS
ROELOFS WILLEM SEINE CHRISTIAN, ISHIBASHI MASASHI, VAN DE VEN WENDY JOHANNA MARTINA, CEKLI HAKKI ERGUN, SCHMITT WEAVER EMIL PETER, KUPERS MICHIEL, DELVIGNE ERIK HENRI ADRIAAN, MC NAMARA ELLIOTT GERARD, RAHMAN RIZVI
Year of Publication 25.01.2022
Get full text
Year of Publication 25.01.2022
Patent
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
YPMA ALEXANDER, WALLERBOS ERIK JOHANNES MARIA, ROELOFS WILLEM SEINE CHRISTIAN, DOVBUSH IRYNA, GROUWSTRA CEDRIC DESIRE, KUPERS MICHIEL, DELVIGNE ERIK HENRI ADRIAAN, HAUPTMANN MARC, DECKERS DAVID FRANS SIMON, KOU WEITIAN, GIOLLO MANUEL, CEKLI HAKKI ERGUN, VAN DER SANDEN STEFAN CORNELIS THEODORUS, VERGAIJ HUIZER LYDIA MARIANNA
Year of Publication 07.10.2022
Get full text
Year of Publication 07.10.2022
Patent
METHOD OF OBTAINING MEASUREMENTS APPARATUS FOR PERFORMING A PROCESS STEP AND METROLOGY APPARATUS
ROELOFS WILLEM SEINE CHRISTIAN, ISHIBASHI MASASHI, VAN DE VEN WENDY JOHANNA MARTINA, CEKLI HAKKI ERGUN, SCHMITT WEAVER EMIL PETER, KUPERS MICHIEL, DELVIGNE ERIK HENRI ADRIAAN, MC NAMARA ELLIOTT GERARD, RAHMAN RIZVI
Year of Publication 04.02.2021
Get full text
Year of Publication 04.02.2021
Patent
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
YPMA ALEXANDER, WALLERBOS ERIK JOHANNES MARIA, ROELOFS WILLEM SEINE CHRISTIAN, DOVBUSH IRYNA, GROUWSTRA CEDRIC DESIRE, KUPERS MICHIEL, DELVIGNE ERIK HENRI ADRIAAN, HAUPTMANN MARC, DECKERS DAVID FRANS SIMON, KOU WEITIAN, GIOLLO MANUEL, CEKLI HAKKI ERGUN, VAN DER SANDEN STEFAN CORNELIS THEODORUS, VERGAIJ HUIZER LYDIA MARIANNA
Year of Publication 13.12.2021
Get full text
Year of Publication 13.12.2021
Patent
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
YPMA ALEXANDER, WALLERBOS ERIK JOHANNES MARIA, ROELOFS WILLEM SEINE CHRISTIAN, DOVBUSH IRYNA, GROUWSTRA CEDRIC DESIRE, KUPERS MICHIEL, DELVIGNE ERIK HENRI ADRIAAN, HAUPTMANN MARC, DECKERS DAVID FRANS SIMON, KOU WEITIAN, GIOLLO MANUEL, CEKLI HAKKI ERGUN, VAN DER SANDEN STEFAN CORNELIS THEODORUS, VERGAIJ HUIZER LYDIA MARIANNA
Year of Publication 05.04.2021
Get full text
Year of Publication 05.04.2021
Patent
측정치 획득 방법, 프로세스 단계 수행 장치, 계측 장치, 디바이스 제조 방법
ROELOFS WILLEM SEINE CHRISTIAN, ISHIBASHI MASASHI, VAN DE VEN WENDY JOHANNA MARTINA, CEKLI HAKKI ERGUN, SCHMITT WEAVER EMIL PETER, KUPERS MICHIEL, DELVIGNE ERIK HENRI ADRIAAN, MC NAMARA ELLIOTT GERARD, RAHMAN RIZVI
Year of Publication 16.01.2019
Get full text
Year of Publication 16.01.2019
Patent
패터닝 프로세스용 보정 결정 방법
YPMA ALEXANDER, WALLERBOS ERIK JOHANNES MARIA, ROELOFS WILLEM SEINE CHRISTIAN, DOVBUSH IRYNA, GROUWSTRA CEDRIC DESIRE, KUPERS MICHIEL, DELVIGNE ERIK HENRI ADRIAAN, HAUPTMANN MARC, DECKERS DAVID FRANS SIMON, KOU WEITIAN, GIOLLO MANUEL, CEKLI HAKKI ERGUN, VAN DER SANDEN STEFAN CORNELIS THEODORUS, VERGAIJ HUIZER LYDIA MARIANNA
Year of Publication 17.05.2019
Get full text
Year of Publication 17.05.2019
Patent
Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus
Van De Ven, Wendy Johanna Martina, McNamara, Elliott Gerard, Roelofs, Willem Seine Christian, Cekli, Hakki Ergün, Rahman, Rizvi, Ishibashi, Masashi, Schmitt-Weaver, Emil Peter, Delvigne, Erik Henri Adriaan, Kupers, Michiel
Year of Publication 03.10.2023
Get full text
Year of Publication 03.10.2023
Patent
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
Van Der Sanden, Stefan Cornelis Theodorus, Giollo, Manuel, Grouwstra, Cédric Désiré, Roelofs, Willem Seine Christian, Cekli, Hakki Ergün, Hauptmann, Marc, Delvigne, Erik Henri Adriaan, Kupers, Michiel, Vergaij-Huizer, Lydia Marianna, Kou, Weitian, Ypma, Alexander, Wallerbos, Erik Johannes Maria, Dovbush, Iryna, Deckers, David Frans Simon
Year of Publication 10.10.2023
Get full text
Year of Publication 10.10.2023
Patent
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
GROUWSTRA, Cédric, Désiré, CEKLI, Hakki, Ergun, DECKERS, David, Frans, Simon, DOVBUSH, Iryna, DELVIGNE, Erik, Henri, Adriaan, KUPERS, Michiel, WALLERBOS, Erik, Johannes, Maria, HAUPTMANN, Marc, VERGAIJ-HUIZER, Lydia, Marianna, ROELOFS, Willem, Seine, Christian, KOU, Weitian, GIOLLO, Manuel, VAN DER SANDEN, Stefan, Cornelis, Theodorus, YPMA, Alexander
Year of Publication 09.08.2023
Get full text
Year of Publication 09.08.2023
Patent
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
Van Der Sanden, Stefan Cornelis Theodorus, Giollo, Manuel, Grouwstra, Cédric Désiré, Roelofs, Willem Seine Christian, Cekli, Hakki Ergün, Hauptmann, Marc, Delvigne, Erik Henri Adriaan, Kupers, Michiel, Vergaij-Huizer, Lydia Marianna, Kou, Weitian, Ypma, Alexander, Wallerbos, Erik Johannes Maria, Dovbush, Iryna, Deckers, David Frans Simon
Year of Publication 28.02.2023
Get full text
Year of Publication 28.02.2023
Patent
METHOD OF OBTAINING MEASUREMENTS, APPARATUS FOR PERFORMING A PROCESS STEP, AND METROLOGY APPARATUS
ROELOFS, Willem Seine Christian, MC NAMARA, Elliott Gerard, SCHMITT-WEAVER, Emil Peter, RAHMAN, Rizvi, CEKLI, Hakki Ergün, DELVIGNE, Erik Henri Adriaan, ISHIBASHI, Masashi, VAN DE VEN, Wendy Johanna Martina, KUPERS, Michiel
Year of Publication 03.02.2022
Get full text
Year of Publication 03.02.2022
Patent
Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus
Van De Ven, Wendy Johanna Martina, McNamara, Elliott Gerard, Roelofs, Willem Seine Christian, Cekli, Hakki Ergün, Rahman, Rizvi, Ishibashi, Masashi, Schmitt-Weaver, Emil Peter, Delvigne, Erik Henri Adriaan, Kupers, Michiel
Year of Publication 16.11.2021
Get full text
Year of Publication 16.11.2021
Patent
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE MANUFACTURING METHOD, CONTROL SYSTEM FOR A LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC APPARATUS
CEKLI, Hakki Ergün, GROUWSTRA, Cédric Désiré, DOVBUSH, Iryna, KUPERS, Michiel, WALLERBOS, Erik Johannes Maria, HAUPTMANN, Marc, ROELOFS, Willem Seine Christian, VAN DER SANDEN, Stefan Cornelis Theodorus, KOU, Weitian, DELVIGNE, Erik Henri Adriaan, GIOLLO, Manuel, DECKERS, David Frans Simon, VERGAIJ-HUIZER, Lydia Marianna, YPMA, Alexander
Year of Publication 21.07.2022
Get full text
Year of Publication 21.07.2022
Patent
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
Van Der Sanden, Stefan Cornelis Theodorus, Giollo, Manuel, Grouwstra, Cédric Désiré, Roelofs, Willem Seine Christian, Cekli, Hakki Ergün, Hauptmann, Marc, Delvigne, Erik Henri Adriaan, Kupers, Michiel, Vergaij-Huizer, Lydia Marianna, Kou, Weitian, Ypma, Alexander, Wallerbos, Erik Johannes Maria, Dovbush, Iryna, Deckers, David Frans Simon
Year of Publication 10.05.2022
Get full text
Year of Publication 10.05.2022
Patent
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
GROUWSTRA, Cédric, Désiré, CEKLI, Hakki, Ergun, DECKERS, David, Frans, Simon, DOVBUSH, Iryna, DELVIGNE, Erik, Henri, Adriaan, KUPERS, Michiel, WALLERBOS, Erik, Johannes, Maria, HAUPTMANN, Marc, VERGAIJ-HUIZER, Lydia, Marianna, ROELOFS, Willem, Seine, Christian, KOU, Weitian, GIOLLO, Manuel, VAN DER SANDEN, Stefan, Cornelis, Theodorus, YPMA, Alexander
Year of Publication 15.09.2021
Get full text
Year of Publication 15.09.2021
Patent
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
GROUWSTRA, Cédric, Désiré, CEKLI, Hakki, Ergun, DECKERS, David, Frans, Simon, DOVBUSH, Iryna, DELVIGNE, Erik, Henri, Adriaan, KUPERS, Michiel, WALLERBOS, Erik, Johannes, Maria, HAUPTMANN, Marc, VERGAIJ-HUIZER, Lydia, Marianna, ROELOFS, Willem, Seine, Christian, KOU, Weitian, GIOLLO, Manuel, VAN DER SANDEN, Stefan, Cornelis, Theodorus, YPMA, Alexander
Year of Publication 19.05.2021
Get full text
Year of Publication 19.05.2021
Patent
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE MANUFACTURING METHOD, CONTROL SYSTEM FOR A LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC APPARATUS
VERGAIJ-HUIZER, Lydia, Marianna, KOU, Weitian, DELVIGNE, Erik, Henri, Adriaan, KUPERS, Michiel, YPMA, Alexander, WALLERBOS, Erik, Johannes, Maria, HAUPTMANN, Marc
Year of Publication 25.04.2018
Get full text
Year of Publication 25.04.2018
Patent
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE MANUFACTURING METHOD, CONTROL SYSTEM FOR A LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC APPARATUS
CEKLI, Hakki Ergün, GROUWSTRA, Cédric Désiré, DOVBUSH, Iryna, KUPERS, Michiel, WALLERBOS, Erik Johannes Maria, HAUPTMANN, Marc, ROELOFS, Willem Seine Christian, VAN DER SANDEN, Stefan Cornelis Theodorus, KOU, Weitian, DELVIGNE, Erik Henri Adriaan, GIOLLO, Manuel, DECKERS, David Frans Simon, VERGAIJ-HUIZER, Lydia Marianna, YPMA, Alexander
Year of Publication 18.03.2021
Get full text
Year of Publication 18.03.2021
Patent
Methods of determining corrections for a patterning process
Van Der Sanden, Stefan Cornelis Theodorus, Giollo, Manuel, Grouwstra, Cédric Désiré, Roelofs, Willem Seine Christian, Cekli, Hakki Ergün, Hauptmann, Marc, Delvigne, Erik Henri Adriaan, Kupers, Michiel, Vergaij-Huizer, Lydia Marianna, Kou, Weitian, Ypma, Alexander, Wallerbos, Erik Johannes Maria, Dovbush, Iryna, Deckers, David Frans Simon
Year of Publication 29.12.2020
Get full text
Year of Publication 29.12.2020
Patent