Polysilicon encapsulated local oxidation of silicon for deep submicron lateral isolation
BADENES, G, ROOYACKERS, R, DE WOLF, I, DEFERM, L
Published in Japanese Journal of Applied Physics (01.03.1997)
Published in Japanese Journal of Applied Physics (01.03.1997)
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Conference Proceeding
Journal Article
Embedded HIMOS(R) flash memory in 0.35 μm and 0.25 μm CMOS technologies
Wellekens, D., Van Houdt, J., Haspeslagh, L., Tsouhlarakis, J., Hendrickx, P., Deferm, L., Maes, H.E.
Published in IEEE transactions on electron devices (01.11.2000)
Published in IEEE transactions on electron devices (01.11.2000)
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Journal Article
Optimization of polysilicon encapsulated local oxidation of silicon : Cavity dimension effects on mechanical stress and gate oxide integrity
BADENES, G, ROOYACKERS, R, JONES, S. K, BAZLEY, D, BEANLAND, R, DE WOLF, I, DEFERM, L
Published in Journal of the Electrochemical Society (01.05.1998)
Published in Journal of the Electrochemical Society (01.05.1998)
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Journal Article
Halo Doping for Good Performance and Reliability in 0.25 μm CMOS Technology
Hendriks, Marton, Badenes, Goncal, Deferm, Ludo
Published in ESSDERC '96: Proceedings of the 26th European Solid State Device Research Conference (01.09.1996)
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Published in ESSDERC '96: Proceedings of the 26th European Solid State Device Research Conference (01.09.1996)
Conference Proceeding
Poly Encapsulated LOCOS Lateral Isolation for 0.25 μm CMOS
Badenes, Goncal, Rooyackers, Rita, Deferm, Ludo
Published in ESSDERC '96: Proceedings of the 26th European Solid State Device Research Conference (01.09.1996)
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Published in ESSDERC '96: Proceedings of the 26th European Solid State Device Research Conference (01.09.1996)
Conference Proceeding
Low Temperature Operation as a Tool to Investigate Second Order Effects in Submicron MOSFET's
Gutierrez D., Edmundo A., Deferm, Ludo
Published in ESSDERC '94: 24th European Solid State Device Research Conference (01.09.1994)
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Published in ESSDERC '94: 24th European Solid State Device Research Conference (01.09.1994)
Conference Proceeding
Closed-form model of the subhalfmicrometer LDD MOSFET overlap capacitance
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Conference Proceeding