Optimisation of RF magnetron sputtering and RTA-crystallisation of Pb(Zr 0.52Ti 0.48)O 3 thin films by means of the orthogonal array method
Defay, Emmanuel, Leberre, Martine, Semmache, Bachir, Troccaz, Michel, Barbier, Daniel
Published in Materials science & engineering. B, Solid-state materials for advanced technology (14.08.1998)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (14.08.1998)
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Journal Article
Optimisation of RF magnetron sputtering and RTA-crystallisation of Pb(Zr0.52Ti0.48)O3 thin films by means of the orthogonal array method
DEFAY, E, LEBERRE, M, SEMMACHE, B, TROCCAZ, M, BARBIER, D
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.08.1998)
Published in Materials science & engineering. B, Solid-state materials for advanced technology (01.08.1998)
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Journal Article
Piezoelectric Materials for Energy Harvesting
Defay, Emmanuel, Boisseau, Sébastien, Despesse, Ghislain
Published in Micro Energy Harvesting (2015)
Published in Micro Energy Harvesting (2015)
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Book Chapter
SAW resonators using electrostrictive effect
Alzuaga, Sebastien, Daniau, William, Baron, Thomas, Martin, Gilles, Salut, Roland, Ballandras, Sylvain, Defay, Emmanuel
Published in 2013 IEEE International Ultrasonics Symposium (IUS) (01.07.2013)
Published in 2013 IEEE International Ultrasonics Symposium (IUS) (01.07.2013)
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Conference Proceeding
METHOD OF FORMING AN ELECTROMECHANICAL TRANSDUCER DEVICE
PACHECO, SERGIO, REY, PATRICE, PERRUCHOT, FRANÇOIS, DEFAY, EMMANUEL, LIU, LIANJUN
Year of Publication 21.01.2015
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Year of Publication 21.01.2015
Patent