Method and apparatus for thin film coating an article
KURMAN; ERIC W, TAYLOR; CLIFFORD E, BJORNARD; ERIK J, STEFFENHAGEN; DEBRA M
Year of Publication 30.05.2000
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Year of Publication 30.05.2000
Patent
Method and apparatus for thin film coating an article
TAYLOR; CLIFFORD L, KURMAN; ERIC W, BJORNARD; ERIK J, STEFFENHAGEN; DEBRA M
Year of Publication 18.11.1997
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Year of Publication 18.11.1997
Patent