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Year of Publication 04.10.2022
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ACTIVE INERTIAL DAMPER SYSTEM AND METHOD
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Year of Publication 16.07.2020
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Year of Publication 14.04.2020
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Year of Publication 30.03.2021
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Year of Publication 30.03.2021
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Simon, Klaus, Van Santen, Helmar, Kolesnychenko, Aleksey Yurievich, Lof, Joeri, Donders, Sjoerd Nicolaas Lambertus, Meijer, Hendricus Johannes Maria, Straaijer, Alexander, Ritsema, Roelof Aeilko Siebrand, Sengers, Timotheus Franciscus, Mertens, Jeroen Johannes Sophia Maria, Butler, Hans, Loopstra, Erik Roelof, Mulkens, Johannes Catharinus Hubertus, Van Schaik, Frank, De Smit, Joannes Theodoor
Year of Publication 29.09.2020
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Year of Publication 29.09.2020
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Lithographic apparatus and device manufacturing method
Simon, Klaus, Van Santen, Helmar, Modderman, Theodorus Marinus, Lof, Joeri, Hoogendam, Christiaan Alexander, Streefkerk, Bob, Straaijer, Alexander, Derksen, Antonius Theodorus Anna Maria, Kolesnychenko, Aleksey, Ritsema, Roelof Aeilko Siebrand, Loopstra, Erik Roelof, Mulkens, Johannes Catharinus Hubertus, De Smit, Joannes Theodoor
Year of Publication 05.03.2019
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Year of Publication 05.03.2019
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Lithographic apparatus and device manufacturing method
Simon, Klaus, Van Santen, Helmar, Verspay, Jacobus Johannus Leonardus Hendricus, Kolesnychenko, Aleksey Yurievich, Lof, Joeri, Hoogendam, Christiaan Alexander, Streefkerk, Bob, Donders, Sjoerd Nicolaas Lambertus, Meijer, Hendricus Johannes Maria, Straaijer, Alexander, Bijlaart, Erik Theodorus Maria, Derksen, Antonius Theodorus Anna Maria, Ritsema, Roelof Aeilko Siebrand, Sengers, Timotheus Franciscus, Mertens, Jeroen Johannes Sophia Maria, Butler, Hans, Loopstra, Erik Roelof, Mulkens, Johannes Catharinus Hubertus, Van Schaik, Frank, De Smit, Joannes Theodoor, Jansen, Hans
Year of Publication 10.12.2019
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Year of Publication 10.12.2019
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Lithographic apparatus and device manufacturing method
Simon, Klaus, Van Santen, Helmar, Kolesnychenko, Aleksey Yurievich, Lof, Joeri, Hoogendam, Christiaan Alexander, Streefkerk, Bob, Donders, Sjoerd Nicolaas Lambertus, Meijer, Hendricus Johannes Maria, Straaijer, Alexander, Bijlaart, Erik Theodorus Maria, Ritsema, Roelof Aeilko Siebrand, Sengers, Timotheus Franciscus, Mertens, Jeroen Johannes Sophia Maria, Butler, Hans, Loopstra, Erik Roelof, Mulkens, Johannes Catharinus Hubertus, Van Schaik, Frank, De Smit, Joannes Theodoor
Year of Publication 16.04.2019
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Year of Publication 16.04.2019
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Lithographic apparatus and device manufacturing method
Simon, Klaus, Van Santen, Helmar, Kolesnychenko, Aleksey Yurievich, Lof, Joeri, Donders, Sjoerd Nicolaas Lambertus, Meijer, Hendricus Johannes Maria, Straaijer, Alexander, Ritsema, Roelof Aeilko Siebrand, Sengers, Timotheus Franciscus, Mertens, Jeroen Johannes Sophia Maria, Butler, Hans, Loopstra, Erik Roelof, Mulkens, Johannes Catharinus Hubertus, Van Schaik, Frank, De Smit, Joannes Theodoor
Year of Publication 29.01.2019
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Year of Publication 29.01.2019
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Year of Publication 15.01.2019
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Year of Publication 15.01.2019
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Van Schaik Frank, Simon Klaus, Ritsema Roelof Aeilko Siebrand, Loopstra Erik Roelof, Meijer Hendricus Johannes Maria, Sengers Timotheus Franciscus, Kolesnychenko Aleksey Yurievich, Lof Joeri, Van Santen Helmar, Straaijer Alexander, Mertens Jeroen Johannes Sophia Maria, Mulkens Johannes Catharinus Hubertus, Butler Hans, Donders Sjoerd Nicolaas Lambertus, De Smit Joannes Theodoor
Year of Publication 22.08.2017
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Year of Publication 22.08.2017
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Simon Klaus, Ritsema Roelof Aeilko Siebrand, Loopstra Erik Roelof, Meijer Hendricus Johannes Maria, Sengers Timotheus Franciscus, Bijlaart Erik Theodorus Maria, Lof Joeri, Hoogendam Christiaan Alexander, Streefkerk Bob, Straaijer Alexander, Mertens Jeroen Johannes Sophia Maria, Mulkens Johannes Catharinus Hubertus, Donders Sjoerd Nicolaas Lambertus, De Smit Joannes Theodoor
Year of Publication 01.11.2016
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Year of Publication 01.11.2016
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Van Schaik Frank, Simon Klaus, Ritsema Roelof Aeilko Siebrand, Loopstra Erik Roelof, LOF Joeri, Meijer Hendricus Johannes Maria, Sengers Timotheus Franciscus, Bijlaart Erik Theodorus Maria, Derksen Antonius Theodorus Anna Maria, Verspay Jacobus Johannus Leonardus Hendricus, Kolesnychenko Aleksey Yurievich, Hoogendam Christiaan Alexander, Streefkerk Bob, Van Santen Helmar, Straaijer Alexander, Jansen Hans, Mertens Jeroen Johannes Sophia Maria, Mulkens Johannes Catharinus Hubertus, Butler Hans, Donders Sjoerd Nicolaas Lambertus, De Smit Joannes Theodoor
Year of Publication 12.01.2017
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Year of Publication 12.01.2017
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Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid
Van Schaik Frank, Simon Klaus, Ritsema Roelof Aeilko Siebrand, Loopstra Erik Roelof, Meijer Hendricus Johannes Maria, Sengers Timotheus Franciscus, Bijlaart Erik Theodorus Maria, Kolesnychenko Aleksey Yurievich, Den Boef Arie Jeffrey Maria, Lof Joeri, Van De Kerkhof Marcus Adrianus, Hoogendam Christiaan Alexander, Streefkerk Bob, Van Santen Helmar, Ottens Joost Jeroen, Straaijer Alexander, Kroon Mark, Mertens Jeroen Johannes Sophia Maria, Mulkens Johannes Catharinus Hubertus, Butler Hans, Donders Sjoerd Nicolaas Lambertus, De Smit Joannes Theodoor
Year of Publication 10.01.2017
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Year of Publication 10.01.2017
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Lithographic apparatus and device manufacturing method
Lof, Joeri, De Smit, Joannes Theodoor, Siebrand Ritsema, Roelof Aeilko, Simon, Klaus, Modderman, Theodorus Marinus, Hubertus Mulkens, Johannes Catharinus, Meijer, Hendricus Johannes Maria, Loopstra, Erik Roelof
Year of Publication 01.01.2013
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Year of Publication 01.01.2013
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