Search Results - "DE SILVA, Ekmini, Anuja" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Comparing PVD Titanium Nitride Film Properties and their Effect on Beyond 7 nm EUV Patterning

Comparing PVD Titanium Nitride Film Properties and their Effect on Beyond 7 nm EUV Patterning

by DeVries, Scott, De Silva, Ekmini Anuja, Canaperi, Donald, Simon, Andrew, de la Pena, Abraham Arceo, Wang, Wei, Maniscalco, Joseph, Meli, Luciana, Mendoza, Brock
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)

Get full text

Conference Proceeding

Forming self-aligned multi-metal interconnects

Forming self-aligned multi-metal interconnects

by De Silva, Ekmini Anuja, Dutta, Ashim
Year of Publication 05.03.2024

Get full text

Patent

Airgap isolation for back-end-of-the-line semiconductor interconnect structure with top via

Airgap isolation for back-end-of-the-line semiconductor interconnect structure with top via

by De Silva, Ekmini Anuja, Joseph, Praveen, Dutta, Ashim, Church, Jennifer
Year of Publication 22.10.2024

Get full text

Patent

Litho-litho-etch (LLE) multi color resist

Litho-litho-etch (LLE) multi color resist

by De Silva, Ekmini Anuja, Mignot, Yann, Goldfarb, Dario
Year of Publication 09.07.2024

Get full text

Patent

Self-aligned top via formation at line ends

Self-aligned top via formation at line ends

by Dominik Metzler, John Arnold, Ashim Dutta, Ekmini Anuja De Silva
Year of Publication 03.07.2024

Get full text

Patent

Vertical field effect transistor with crosslink fin arrangement

Vertical field effect transistor with crosslink fin arrangement

by De Silva, Ekmini Anuja, Zhang, Chen, Xie, Ruilong, Seshadri, Indira
Year of Publication 04.06.2024

Get full text

Patent

FORMING SELF-ALIGNED MULTI-METAL INTERCONNECTS

FORMING SELF-ALIGNED MULTI-METAL INTERCONNECTS

by De Silva, Ekmini Anuja, DUTTA, Ashim
Year of Publication 18.08.2022

Get full text

Patent

Forming self-aligned multi-metal interconnects

Forming self-aligned multi-metal interconnects

by De Silva, Ekmini Anuja, Dutta, Ashim
Year of Publication 07.06.2022

Get full text

Patent

High-density resistive random-access memory array with self-aligned bottom electrode contact

High-density resistive random-access memory array with self-aligned bottom electrode contact

by De Silva, Ekmini Anuja, Dutta, Ashim, Schmidt, Daniel, Kong, Dexin
Year of Publication 26.12.2023

Get full text

Patent

Placing top vias at line ends by selective growth of via mask from line cut dielectric

Placing top vias at line ends by selective growth of via mask from line cut dielectric

by De Silva, Ekmini Anuja, Dutta, Ashim, Arnold, John, Metzler, Dominik
Year of Publication 28.11.2023

Get full text

Patent

Selective encapsulation for metal electrodes of embedded memory devices

Selective encapsulation for metal electrodes of embedded memory devices

by De Silva, Ekmini Anuja, Dutta, Ashim, Church, Jennifer
Year of Publication 03.10.2023

Get full text

Patent

Embedded memory pillar

Embedded memory pillar

by De Silva, Ekmini Anuja, Dutta, Ashim, Schmidt, Daniel, Kong, Dexin
Year of Publication 05.09.2023

Get full text

Patent

Fabrication of embedded memory devices utilizing a self assembled monolayer

Fabrication of embedded memory devices utilizing a self assembled monolayer

by De Silva, Ekmini Anuja, Dutta, Ashim, Yang, Chih-Chao
Year of Publication 29.08.2023

Get full text

Patent

Inverse tone pillar printing method using organic planarizing layer pillars

Inverse tone pillar printing method using organic planarizing layer pillars

by De Silva, Ekmini Anuja, Joseph, Praveen, Dutta, Ashim, Felix, Nelson
Year of Publication 11.07.2023

Get full text

Patent

VERTICAL FIELD EFFECT TRANSISTOR WITH CROSSLINK FIN ARRANGEMENT

VERTICAL FIELD EFFECT TRANSISTOR WITH CROSSLINK FIN ARRANGEMENT

by De Silva, Ekmini Anuja, Zhang, Chen, Xie, Ruilong, Seshadri, Indira
Year of Publication 29.06.2023

Get full text

Patent

HIGH-DENSITY RESISTIVE RANDOM-ACCESS MEMORY ARRAY WITH SELF-ALIGNED BOTTOM ELECTRODE CONTACT

HIGH-DENSITY RESISTIVE RANDOM-ACCESS MEMORY ARRAY WITH SELF-ALIGNED BOTTOM ELECTRODE CONTACT

by De Silva, Ekmini Anuja, Dutta, Ashim, Schmidt, Daniel, Kong, Dexin
Year of Publication 11.05.2023

Get full text

Patent

Vertical field effect transistor with crosslink fin arrangement

Vertical field effect transistor with crosslink fin arrangement

by De Silva, Ekmini Anuja, Zhang, Chen, Xie, Ruilong, Seshadri, Indira
Year of Publication 04.04.2023

Get full text

Patent

EMBEDDED MEMORY PILLAR

EMBEDDED MEMORY PILLAR

by De Silva, Ekmini Anuja, Dutta, Ashim, Schmidt, Daniel, Kong, Dexin
Year of Publication 30.03.2023

Get full text

Patent

LITHO-LITHO-ETCH (LLE) MULTI COLOR RESIST

LITHO-LITHO-ETCH (LLE) MULTI COLOR RESIST

by De Silva, Ekmini Anuja, Mignot, Yann, Goldfarb, Dario
Year of Publication 30.03.2023

Get full text

Patent

AIRGAP ISOLATION FOR BACK-END-OF-THE-LINE SEMICONDUCTOR INTERCONNECT STRUCTURE WITH TOP VIA

AIRGAP ISOLATION FOR BACK-END-OF-THE-LINE SEMICONDUCTOR INTERCONNECT STRUCTURE WITH TOP VIA

by De Silva, Ekmini Anuja, Joseph, Praveen, Dutta, Ashim, Church, Jennifer
Year of Publication 30.03.2023

Get full text

Patent

1
2
3
4
5
6
7
8
9
10
11
Next
[11]