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Year of Publication 08.06.2021
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LEVEL SENSOR APPARATUS, METHOD OF MEASURING TOPOGRAPHICAL VARIATION ACROSS A SUBSTRATE, METHOD OF MEASURING VARIATION OF A PHYSICAL PARAMETER RELATED TO A LITHOGRAPHIC PROCESS, AND LITHOGRAPHIC APPARATUS
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LEVEL SENSOR APPARATUS, METHOD OF MEASURING TOPOGRAPHICAL VARIATION ACROSS A SUBSTRATE, METHOD OF MEASURING VARIATION OF A PHYSICAL PARAMETER RELATED TO A LITHOGRAPHIC PROCESS, AND LITHOGRAPHIC APPARATUS
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Year of Publication 01.02.2018
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A method for measuring derived data and computer program product
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Year of Publication 21.04.2020
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Year of Publication 21.04.2020
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Level sensor apparatus, method of measuring topographical variation across a substrate, method of measuring variation of a physical parameter related to a lithographic process, and lithographic apparatus
HASAN, TANBIR, STAALS, FRANK, DE NIVELLE, MARTIN JULES MARIE-EMILE, TEL, WIM TJIBBO
Year of Publication 16.02.2019
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Year of Publication 16.02.2019
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Level sensor apparatus, method of measuring topographical variation across a substrate, method of measuring variation of a physical parameter related to a lithographic process, and lithographic apparatus
HASAN, TANBIR, STAALS, FRANK, DE NIVELLE, MARTIN JULES MARIE-EMILE, TEL, WIM TJIBBO
Year of Publication 01.01.2019
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Year of Publication 01.01.2019
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Level sensor apparatus, method of measuring topographical variation across a substrate, method of measuring variation of a physical parameter related to a lithographic process, and lithographic apparatus
HASAN, TANBIR, STAALS, FRANK, DE NIVELLE, MARTIN JULES MARIE-EMILE, TEL, WIM TJIBBO
Year of Publication 01.04.2018
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Year of Publication 01.04.2018
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