Methods and apparatus for measuring a property of a substrate
De Mol, Christianus Gerardus Maria, Li, Chung-Hsun, Ten Berge, Peter, Verstappen, Leonardus Henricus Marie, Jungblut, Reiner Maria, Van Bilsen, Franciscus Bernardus Maria, Tolsma, Hoite Pieter Theodoor, Elings, Wouter Lodewijk, Dicker, Gerald, Van Wijnen, Paul Jacques, Mos, Everhardus Cornelis
Year of Publication 07.05.2024
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Year of Publication 07.05.2024
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Methods and Apparatus for Measuring a Property of a Substrate
De Mol, Christianus Gerardus Maria, Li, Chung-Hsun, Ten Berge, Peter, Verstappen, Leonardus Henricus Marie, Jungblut, Reiner Maria, Van Bilsen, Franciscus Bernardus Maria, Tolsma, Hoite Pieter Theodoor, Elings, Wouter Lodewijk, Dicker, Gerald, Van Wijnen, Paul Jacques, Mos, Everhardus Cornelis
Year of Publication 15.07.2021
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Year of Publication 15.07.2021
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Methods and apparatus for measuring a property of a substrate
De Mol, Christianus Gerardus Maria, Li, Chung-Hsun, Ten Berge, Peter, Verstappen, Leonardus Henricus Marie, Jungblut, Reiner Maria, Van Bilsen, Franciscus Bernardus Maria, Tolsma, Hoite Pieter Theodoor, Elings, Wouter Lodewijk, Dicker, Gerald, Van Wijnen, Paul Jacques, Mos, Everhardus Cornelis
Year of Publication 04.05.2021
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Year of Publication 04.05.2021
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Methods and apparatus for measuring a property of a substrate
De Mol, Christianus Gerardus Maria, Li, Chung-Hsun, Ten Berge, Peter, Verstappen, Leonardus Henricus Marie, Jungblut, Reiner Maria, Van Bilsen, Franciscus Bernardus Maria, Tolsma, Hoite Pieter Theodoor, Elings, Wouter Lodewijk, Dicker, Gerald, Van Wijnen, Paul Jacques, Mos, Everhardus Cornelis
Year of Publication 18.08.2020
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Year of Publication 18.08.2020
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Lithographic apparatus and device manufacturing method involving a heater
Boom, Herman, Ten Kate, Nicolaas, De Mol, Christianus Gerardus Maria, Quaedackers, Johannes Anna, De Jong, Frederik Eduard, Nihtianov, Stoyan, Riepen, Michel, Mertens, Jeroen Johannes Sophia Maria, Loopstra, Erik Roelof, Moerman, Richard, Menchtchikov, Boris, Van Meer, Aschwin Lodewijk Hendricus Johannes, Goorman, Koen, Cadee, Theodorus Petrus Maria, Stavenga, Marco Koert, Tinnemans, Patricius Aloysius Jacobus, Verspay, Jacobus Johannus Leonardus Hendricus, Jacobs, Johannes Henricus Wilhelmus, Reuhman-Huisken, Maria Elisabeth, Verhagen, Martinus Cornelis Maria, Smeets, Martin Frans Pierre, Schoondermark, Bart Leonard Peter, Van Der Net, Antonius Johannus, Janssen, Franciscus Johannes Joseph, Ottens, Joost Jeroen, Muitjens, Marcel Johannus Elisabeth Hubertus
Year of Publication 05.07.2022
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Year of Publication 05.07.2022
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Methods and Apparatus for Measuring a Property of a Substrate
De Mol, Christianus Gerardus Maria, Li, Chung-Hsun, Ten Berge, Peter, Verstappen, Leonardus Henricus Marie, ELINGS, Wouter Lodewijk, Jungblut, Reiner Maria, Van Bilsen, Franciscus Bernardus Maria, Tolsma, Hoite Pieter Theodoor, Dicker, Gerald, Van Wijnen, Paul Jacques, Mos, Everhardus Cornelis
Year of Publication 03.10.2019
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Year of Publication 03.10.2019
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Methods and apparatus for measuring a property of a substrate
De Mol, Christianus Gerardus Maria, Li, Chung-Hsun, Ten Berge, Peter, Verstappen, Leonardus Henricus Marie, Jungblut, Reiner Maria, Van Bilsen, Franciscus Bernardus Maria, Tolsma, Hoite Pieter Theodoor, Elings, Wouter Lodewijk, Dicker, Gerald, Van Wijnen, Paul Jacques, Mos, Everhardus Cornelis
Year of Publication 11.06.2019
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Year of Publication 11.06.2019
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Lithographic apparatus and device manufacturing method involving a heater
Boom, Herman, Ten Kate, Nicolaas, De Mol, Christianus Gerardus Maria, Quaedackers, Johannes Anna, De Jong, Frederik Eduard, Nihtianov, Stoyan, Riepen, Michel, Mertens, Jeroen Johannes Sophia Maria, Loopstra, Erik Roelof, Moerman, Richard, Menchtchikov, Boris, Van Meer, Aschwin Lodewijk Hendricus Johannes, Goorman, Koen, Cadee, Theodorus Petrus Maria, Stavenga, Marco Koert, Tinnemans, Patricius Aloysius Jacobus, Verspay, Jacobus Johannus Leonardus Hendricus, Jacobs, Johannes Henricus Wilhelmus, Reuhman-Huisken, Maria Elisabeth, Verhagen, Martinus Cornelis Maria, Smeets, Martin Frans Pierre, Schoondermark, Bart Leonard Peter, Van Der Net, Antonius Johannus, Janssen, Franciscus Johannes Joseph, Ottens, Joost Jeroen, Muitjens, Marcel Johannus Elisabeth Hubertus
Year of Publication 17.11.2020
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Year of Publication 17.11.2020
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Methods and apparatus for measuring a property of a substrate
Dicker Gerald, Mos Everhardus Cornelis, Jungblut Reiner Maria, Verstappen Leonardus Henricus Marie, Chung-Hsun Li, Van Bilsen Franciscus Bernardus Maria, De Mol Christianus Gerardus Maria, Van Wijnen Paul Jacques, Tolsma Hoite Pieter Theodoor, Elings Wouter Lodewijk, Ten Berge Peter
Year of Publication 14.03.2017
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Year of Publication 14.03.2017
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Lithographic apparatus and device manufacturing method involving a heater
Boom, Herman, Ten Kate, Nicolaas, De Mol, Christianus Gerardus Maria, Quaedackers, Johannes Anna, De Jong, Frederik Eduard, Nihtianov, Stoyan, Riepen, Michel, Mertens, Jeroen Johannes Sophia Maria, Loopstra, Erik Roelof, Moerman, Richard, Menchtchikov, Boris, Van Meer, Aschwin Lodewijk Hendricus Johannes, Goorman, Koen, Cadee, Theodorus Petrus Maria, Stavenga, Marco Koert, Tinnemans, Patricius Aloysius Jacobus, Verspay, Jacobus Johannus Leonardus Hendricus, Jacobs, Johannes Henricus Wilhelmus, Reuhman-Huisken, Maria Elisabeth, Verhagen, Martinus Cornelis Maria, Smeets, Martin Frans Pierre, Schoondermark, Bart Leonard Peter, Van Der Net, Antonius Johannus, Janssen, Franciscus Johannes Joseph, Ottens, Joost Jeroen, Muitjens, Marcel Johannus Elisabeth Hubertus
Year of Publication 09.04.2019
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Year of Publication 09.04.2019
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Methods and Apparatus for Measuring a Property of a Substrate
DICKER, Gerald, TEN BERGE, Peter, VAN WIJNEN, Paul Jacques, MOS, Everhardus Cornelis, LI, Chung-Hsun, VERSTAPPEN, Leonard us Henricus Marie, ELINGS, Wouter Lodewijk, DE MOL, Christianus Gerardus Maria, JUNGBLUT, Reiner Maria, TOLSMA, Hoite Pieter Theodoor, VAN BILSEN, Franciscus Bernardus Maria
Year of Publication 08.10.2020
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Year of Publication 08.10.2020
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Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program
Van Der Veen, Michael, Bruinsma, Anastasius Jacobus Anicetus, Van Buel, Henricus Wilhelmus Maria, Klinkhamer, Jacob Fredrik Friso, Leenders, Martinus Hendrikus Antonius, De Mol, Christianus Gerardus Maria, Van Mierlo, Hubert Adriaan
Year of Publication 20.01.2009
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Year of Publication 20.01.2009
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A HEATER
TEN KATE, Nicolaas, VAN DER NET, Antonius Johannus, JANSSEN, Franciscus Johannes Joseph, DE JONG, Frederik Eduard, SMEETS, Martin Frans Pierre, RIEPEN, Michel, TINNEMANS, Patricius Aloysius Jacobus, VERHAGEN, Martinus Cornelis Maria, OTTENS, Joost Jeroen, MOERMAN, Richard, BOOM, Herman, REUHMAN-HUISKEN, Maria Elisabeth, VERSPAY, Jacobus Johannus Leonardus Hendricus, STAVENGA, Marco Koert, LOOPSTRA, Erik Roelof, GOORMAN, Koen, QUAEDACKERS, Johannes Anna, DE MOL, Christianus Gerardus Maria, MENCHTCHIKOV, Boris, NIHTIANOV, Stoyan, SCHOONDERMARK, Bart Leonard Peter, JACOBS, Johannes Henricus Wilhelmus, VAN MEER, Aschwin Lodewijk Hendricus Johannes, MUITJENS, Marcel Johannus Elisabeth Hubertus, MERTENS, Jeroen Johannes Sophia Maria, CADEE, Theodorus Petrus Maria
Year of Publication 04.03.2021
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Year of Publication 04.03.2021
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Lithographic apparatus and device manufacturing method having liquid evaporation control
Cadee, Theodorus Petrus Maria, Jacobs, Johannes Henricus Wilhelmus, Ten Kate, Nicolaas, Loopstra, Erik Roelof, Vermeer, Aschwin Lodewijk Hendricus Johannes, Mertens, Jeroen Johannes Sophia Maria, De Mol, Christianus Gerardus Maria, Muitjens, Marcel Johannus Elisabeth Hubertus, Van Der Net, Antonius Johannus, Ottens, Joost Jeroen, Quaedackers, Johannes Anna, Reuhman-Huisken, Maria Elisabeth, Stavenga, Marco Koert, Tinnemans, Patricius Aloysius Jacobus, Verhagen, Martinus Cornelis Maria, Verspay, Jacobus Johannus Leonardus Hendricus, De Jong, Frederik Eduard, Goorman, Koen, Menchtchikov, Boris, Boom, Herman, Nihtianov, Stoyan, Moerman, Richard, Smeets, Martin Frans Pierre, Schoondermark, Bart Leonard Peter, Janssen, Franciscus Johannes Joseph, Riepen, Michel
Year of Publication 28.09.2010
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Year of Publication 28.09.2010
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Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured thereby
de Mol, Christianus Gerardus Maria, Castenmiller, Thomas Josephus Maria, van Dijk, Marcel, Commissaris, Franciscus Antonius Chrysogonus Marie, de Groot, Simon, van den Enden, Catharina Johanna Lucia Maria
Year of Publication 13.05.2003
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Year of Publication 13.05.2003
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