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Year of Publication 25.08.2022
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Year of Publication 25.08.2022
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Multi-step pre-clean for selective metal gap fill
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Year of Publication 05.07.2022
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Year of Publication 05.07.2022
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Multi-Step Pre-Clean for Selective Metal Gap Fill
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Year of Publication 11.11.2021
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Method for forming a metal gapfill
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Year of Publication 07.06.2022
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Year of Publication 07.06.2022
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Selective etching of silicon nitride
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Year of Publication 28.08.2012
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Year of Publication 28.08.2012
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Direct real-time monitoring and feedback control of RF plasma output for wafer processing
Or, David T, Chang, Yu, Kuang, William, Huston, Joel M, Kao, Chien-Teh, Chang, Mei
Year of Publication 22.03.2011
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Year of Publication 22.03.2011
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IN-SITU CHAMBER CLEANING PROCESS FOR REMOVING DEPOSIT OF BY-PRODUCT FROM CHEMICAL VAPOR DEPOSITION ETCHING CHAMBER
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Year of Publication 27.12.2012
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Year of Publication 27.12.2012
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Substrate support lift pin
Or, David T, Koai, Keith K, Takahama, Hiroyuki, Ito, Takahiro, Ota, Koji, Sato, Hiroshi
Year of Publication 13.05.2008
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Year of Publication 13.05.2008
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PROCESS CHAMBER WITH PRESSURE CHARGING AND PULSING CAPABILITY
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Year of Publication 16.05.2024
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Year of Publication 16.05.2024
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Reduced friction lift pin
Or, David T, Koai, Keith K, Takahama, Hiroyuki, Ito, Takahiro, Ota, Koji, Sato, Hiroshi
Year of Publication 03.05.2005
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Year of Publication 03.05.2005
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SELECTIVE PASSIVATION OF DAMAGED NITRIDE
BHUYAN, Bhaskar Jyoti, SALY, Mark, LU, Jiang, ZHANG, Shumao, OR, David T, MENDOZA-GUTIERREZ, Jesus Candelario, DANGERFIELD, Aaron, ZHANG, Le
Year of Publication 04.05.2023
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Year of Publication 04.05.2023
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