CONTROLLED-POROSITY METHOD FOR FORMING POLISHING PAD
TONG YUHUA, MARK R STUCK, MARTY DEGROOT, ANDREW WANK, DAVID MICHAEL VENEZIALE, GEORGE C JACOB, JEFFREY B MILLER, DIEGO LUGO
Year of Publication 16.03.2017
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Year of Publication 16.03.2017
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METHOD OF MAKING POLISHING LAYER FOR CHEMICAL MECHANICAL POLISHING PAD
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Year of Publication 19.01.2017
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CHEMICAL MECHANICAL POLISHING PAD AND MANUFACTURING METHOD FOR THE POLISHING PAD
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Year of Publication 16.03.2017
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Year of Publication 16.03.2017
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MANUFACTURING METHOD FOR COMPOSITE POLISHING LAYER FOR CHEMICAL POLISHING PAD
TONG YUHUA, MARK R STUCK, JULIA KOZHUKH, TERESA BRUGAROLAS BRUFAU, ANDREW WANK, DAVID MICHAEL VENEZIALE, GEORGE C JACOB, JEFFREY B MILLER, QIAN BAINIAN, DIEGO LUGO, JEFFREY JAMES HENDRON, TONY QUAN TRAN
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Year of Publication 16.03.2017
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Method of making polishing layer for chemical mechanical polishing pad
Lugo, Diego, Qian, Bainian, Miller, Jeffrey B, Wank, Andrew, DeGroot, Marty W, Yeh, Fengji, Brugarolas Brufau, Teresa, Tong, Yuhua, Veneziale, David Michael, Jacob, George C, Kozhukh, Julia
Year of Publication 04.12.2018
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Year of Publication 04.12.2018
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Method of making polishing layer for chemical mechanical polishing pad
Lugo, Diego, Qian, Bainian, Miller, Jeffrey B, Wank, Andrew, DeGroot, Marty W, Yeh, Fengji, Brugarolas Brufau, Teresa, Tong, Yuhua, Veneziale, David Michael, Jacob, George C, Kozhukh, Julia
Year of Publication 23.10.2018
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Year of Publication 23.10.2018
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Controlled-porosity method for forming polishing pad
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Year of Publication 26.06.2018
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Method of making composite polishing layer for chemical mechanical polishing pad
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Year of Publication 09.10.2018
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Year of Publication 09.10.2018
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Method of making composite polishing layer for chemical mechanical polishing pad
Lugo, Diego, Qian, Bainian, Miller, Jeffrey B, Wank, Andrew, Brugarolas Brufau, Teresa, Tran, Tony Quan, Stack, Marc R, Tong, Yuhua, Veneziale, David Michael, Hendron, Jeffrey James, Jacob, George C, Kozhukh, Julia
Year of Publication 03.07.2018
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Year of Publication 03.07.2018
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METHOD OF MAKING POLISHING LAYER FOR CHEMICAL MECHANICAL POLISHING PAD
Miller Jeffrey B, Brugarolas Brufau Teresa, Yeh Fengji, Wank Andrew, Tong Yuhua, Lugo Diego, Veneziale David Michael, Kozhukh Julia, Qian Bainian, DeGroot Marty W, Jacob George C
Year of Publication 29.12.2016
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Year of Publication 29.12.2016
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METHOD OF MAKING POLISHING LAYER FOR CHEMICAL MECHANICAL POLISHING PAD
Miller Jeffrey B, Brugarolas Brufau Teresa, Yeh Fengji, Wank Andrew, Tong Yuhua, Lugo Diego, Veneziale David Michael, Kozhukh Julia, Qian Bainian, DeGroot Marty W, Jacob George C
Year of Publication 29.12.2016
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Year of Publication 29.12.2016
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CONTROLLED-POROSITY METHOD FOR FORMING POLISHING PAD
Stack Marc R, Miller Jeffrey B, Wank Andrew, Tong Yuhua, Lugo Diego, Veneziale David Michael, DeGroot Marty W, Jacob George C
Year of Publication 29.12.2016
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Year of Publication 29.12.2016
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Chemical mechanical polishing pad and method of making same
Stack Marc R, Tran Tony Quan, Wank Andrew, Tong Yuhua, Lugo Diego, Veneziale David Michael, DeGroot Marty W, Jacob George C, Miller Jeffrey B, Brugarolas Brufau Teresa, Yeh Fengji, Kozhukh Julia, Qian Bainian
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Year of Publication 03.10.2017
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Chemical mechanical polishing pad and method of making same
Stack Marc R, Tran Tony Quan, Wank Andrew, Tong Yuhua, Lugo Diego, Veneziale David Michael, DeGroot Marty W, Jacob George C, Miller Jeffrey B, Brugarolas Brufau Teresa, Yeh Fengji, Kozhukh Julia, Qian Bainian
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Year of Publication 07.03.2017
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METHOD OF MAKING COMPOSITE POLISHING LAYER FOR CHEMICAL MECHANICAL POLISHING PAD
Miller Jeffrey B, Stack Marc R, Hendron Jeffrey James, Brugarolas Brufau Teresa, Tran Tony Quan, Wank Andrew, Tong Yuhua, Lugo Diego, Kozhukh Julia, Veneziale David Michael, Qian Bainian, Jacob George C
Year of Publication 29.12.2016
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Year of Publication 29.12.2016
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CHEMICAL MECHANICAL POLISHING PAD AND METHOD OF MAKING SAME
Stack Marc R, Tran Tony Quan, Wank Andrew, Tong Yuhua, Lugo Diego, Veneziale David Michael, DeGroot Marty W, Jacob George C, Miller Jeffrey B, Brugarolas Brufau Teresa, Yeh Fengji, Kozhukh Julia, Qian Bainian
Year of Publication 29.12.2016
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Year of Publication 29.12.2016
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METHOD OF MAKING COMPOSITE POLISHING LAYER FOR CHEMICAL MECHANICAL POLISHING PAD
Miller Jeffrey B, Stack Marc R, Hendron Jeffrey James, Brugarolas Brufau Teresa, Tran Tony Quan, Wank Andrew, Tong Yuhua, Lugo Diego, Kozhukh Julia, Veneziale David Michael, Qian Bainian, Jacob George C
Year of Publication 29.12.2016
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Year of Publication 29.12.2016
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CHEMICAL MECHANICAL POLISHING PAD AND METHOD OF MAKING SAME
Stack Marc R, Tran Tony Quan, Wank Andrew, Tong Yuhua, Lugo Diego, Veneziale David Michael, DeGroot Marty W, Jacob George C, Miller Jeffrey B, Brugarolas Brufau Teresa, Yeh Fengji, Kozhukh Julia, Qian Bainian
Year of Publication 29.12.2016
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Year of Publication 29.12.2016
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Method of making polishing layer for chemical mechanical polishing pad
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Year of Publication 01.10.2020
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Controlled-porosity method for forming polishing pad
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Year of Publication 21.09.2020
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