계측 툴의 회전 교정을 위한 시스템 및 방법
PASKOVER YURI, UZIEL YORAM, MANASSEN AMNON, NOVIKOV ALEXANDER, FELER YOEL, BEN DAVID NIR, DOLEV IDO
Year of Publication 12.04.2024
Get full text
Year of Publication 12.04.2024
Patent
반도체 디바이스 웨이퍼에 대한 향상된 계측을 위한 시스템 및 방법
YERUSHALMI LIRAN, UZIEL YORAM, SIMON YOSSI, MANASSEN AMNON, NEGRI DARIA, BACHAR OHAD, LAVERT ETAY, BEN DAVID NIR
Year of Publication 27.12.2023
Get full text
Year of Publication 27.12.2023
Patent
OVERLAY METROLOGY PERFORMANCE ENHANCEMENT
NACHSHON ROTHMAN, DAVID NIR BEN, ANDREW V HILL, ANNA GOLOTSVAN, YONATAN VAKNIN, AMNON MANASSEN, NIREEKSHAN K REDDY, VLADIMIR LEVINSKI, YOSSI SIMON, YORAM UZIEL, AVI ABRAMOV, NADAV GUTMAN, DARIA NEGRI, YURI PASKOVER, DROR YAACOV
Year of Publication 31.05.2024
Get full text
Year of Publication 31.05.2024
Patent
ENHANCING PERFORMANCE OF OVERLAY METROLOGY
PASKOVER YURI, GOLOTSVAN ANNA, UZIEL YORAM, SIMON YOSSI, MANASSEN AMNON, LEVINSKI VLADIMIR, GUTMAN NADAV, HILL ANDREW V, YAACOV DROR, REDDY NIREEKSHAN K, NEGRI DARIA, ROTHMAN NACHSHON, VAKNIN YONATAN, BEN DAVID NIR, ABRAMOV AVI
Year of Publication 22.03.2024
Get full text
Year of Publication 22.03.2024
Patent
계측 측정에 있어서 에러 감소를 위한 시스템 및 방법
GOLOTSVAN ANNA, YERUSHALMI LIRAN, LAHAV OREN, MANASSEN AMNON, VOLKOVICH ROIE, KATZ SHLOMIT, DROR CHEN, DIRAWI RAWI, BEN DAVID NIR
Year of Publication 25.03.2022
Get full text
Year of Publication 25.03.2022
Patent
오버레이 계측의 성능 향상
PASKOVER YURI, GOLOTSVAN ANNA, UZIEL YORAM, SIMON YOSSI, MANASSEN AMNON, LEVINSKI VLADIMIR, GUTMAN NADAV, HILL ANDREW V, YAACOV DROR, REDDY NIREEKSHAN K, NEGRI DARIA, ROTHMAN NACHSHON, VAKNIN YONATAN, BEN DAVID NIR, ABRAMOV AVI
Year of Publication 04.12.2023
Get full text
Year of Publication 04.12.2023
Patent
CONDUCTIVE ELEMENT FOR ELECTRICALLY COUPLING AN EUVL MASK TO A SUPPORTING CHUCK
AVNERI ISRAEL, UZIEL YORAM, HOLCMAN IDO, YAIR ITZAK, BASSON YOSI, KRIVTS(KRAYVITZ) IGOR, BEN DAVID NIR
Year of Publication 04.04.2013
Get full text
Year of Publication 04.04.2013
Patent