METHOD AND DEVICE FOR DISPLACING WAFERS IN A DEPOSITION REACTOR
STINSON, MARK, G, DAUCHESS, DANIEL, A., III, CHOWNING, GREGORY, K, BAKER, KENNETH, W
Year of Publication 15.11.2001
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Year of Publication 15.11.2001
Patent
Method and device for displacing wafers in a deposition reactor
DAUCHESS III, DANIEL A, BAKER, KENNETH W, STINSON, MARK G, CHOWNING, GREGORY K
Year of Publication 01.01.2001
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Year of Publication 01.01.2001
Patent
METHOD AND DEVICE FOR DISPLACING WAFERS IN A DEPOSITION REACTOR
STINSON, MARK, G, DAUCHESS, DANIEL, A., III, CHOWNING, GREGORY, K, BAKER, KENNETH, W
Year of Publication 06.01.2000
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Year of Publication 06.01.2000
Patent