Search Results - "DARRELL EHRLICH" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLY FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURE

REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLY FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURE

by HAN ZHUMIN, ALEJANDRO SANCHEZ, JOANNA WU, GRAYSON FORD, ARAVIND ALWAN, DARRELL EHRLICH, RAPHAEL CASAES, KEVIN LEUNG, ANTHONY CONTRERAS
Year of Publication 26.12.2023

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Patent

LAMINATED HEATER WITH DIFFERENT HEATER TRACE MATERIALS

LAMINATED HEATER WITH DIFFERENT HEATER TRACE MATERIALS

by ERIC A PAPE, OKURA YUMA, DARRELL EHRLICH
Year of Publication 07.12.2017

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Patent

CONNECTIONS BETWEEN LAMINATED HEATER AND HEATER VOLTAGE INPUTS

CONNECTIONS BETWEEN LAMINATED HEATER AND HEATER VOLTAGE INPUTS

by ERIC A PAPE, OKURA YUMA, DARRELL EHRLICH
Year of Publication 07.12.2017

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Patent

REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLY FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURE

REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLY FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURE

by HAN ZHUMIN, ALEJANDRO SANCHEZ, JOANNA WU, GRAYSON FORD, ARAVIND ALWAN, DARRELL EHRLICH, RAPHAEL CASAES, KEVIN LEUNG, ANTHONY CONTRERAS
Year of Publication 15.07.2021

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Patent

Chuck for plasma processing chamber

Chuck for plasma processing chamber

by Erickson, Ann, Ehrlich, Darrell
Year of Publication 29.10.2024

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Patent

MIXED METAL BASEPLATES FOR IMPROVED THERMAL EXPANSION MATCHING WITH THERMAL OXIDE SPRAYCOAT

MIXED METAL BASEPLATES FOR IMPROVED THERMAL EXPANSION MATCHING WITH THERMAL OXIDE SPRAYCOAT

by SAMULON, Eric, EHRLICH, Darrell
Year of Publication 09.02.2023

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Patent

CHUCK FOR PLASMA PROCESSING CHAMBER

CHUCK FOR PLASMA PROCESSING CHAMBER

by ERICKSON, Ann, EHRLICH, Darrell
Year of Publication 05.05.2022

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Patent

MIXED METAL BASEPLATES FOR IMPROVED THERMAL EXPANSION MATCHING WITH THERMAL OXIDE SPRAYCOAT

MIXED METAL BASEPLATES FOR IMPROVED THERMAL EXPANSION MATCHING WITH THERMAL OXIDE SPRAYCOAT

by SAMULON, Eric, EHRLICH, Darrell
Year of Publication 22.07.2021

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Patent

MOVEABLE EDGE RINGS FOR PLASMA PROCESSING SYSTEMS

MOVEABLE EDGE RINGS FOR PLASMA PROCESSING SYSTEMS

by PHAM, Johnny, KIMBALL, Christopher, EHRLICH, Darrell
Year of Publication 04.01.2024

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Patent

CHUCK FOR PLASMA PROCESSING CHAMBER

CHUCK FOR PLASMA PROCESSING CHAMBER

by ERICKSON, Ann, EHRLICH, Darrell
Year of Publication 17.09.2020

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Patent

MOVEABLE EDGE RINGS FOR PLASMA PROCESSING SYSTEMS

MOVEABLE EDGE RINGS FOR PLASMA PROCESSING SYSTEMS

by OHKURA, Yuma, KIMBALL, Christopher, EHRLICH, Darrell
Year of Publication 16.11.2023

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Patent

ANODIZATION FOR METAL MATRIX COMPOSITE SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS

ANODIZATION FOR METAL MATRIX COMPOSITE SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS

by SAMULON, Eric, EHRLICH, Darrell, DAS, Debanjan
Year of Publication 26.10.2023

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Patent

MOVEABLE EDGE RINGS FOR PLASMA PROCESSING SYSTEMS

MOVEABLE EDGE RINGS FOR PLASMA PROCESSING SYSTEMS

by OHKURA, Yuma, KIMBALL, Christopher, EHRLICH, Darrell
Year of Publication 16.08.2023

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Patent

ARC-RESISTANT ELECTROSTATIC CHUCKS AND ARC-REDUCING PLUGS FOR ELECTROSTATIC CHUCKS

ARC-RESISTANT ELECTROSTATIC CHUCKS AND ARC-REDUCING PLUGS FOR ELECTROSTATIC CHUCKS

by COMENDANT, Keith, SAMULON, Eric, EHRLICH, Darrell, MATYUSHKIN, Alexander
Year of Publication 12.09.2024

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Patent

Electrostatic chuck with ceramic monolithic body

Electrostatic chuck with ceramic monolithic body

by Wang, Feng, Kimball, Christopher, Ehrlich, Darrell, Gaff, Keith
Year of Publication 23.04.2024

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Patent

MOVEABLE EDGE RINGS FOR PLASMA PROCESSING SYSTEMS

MOVEABLE EDGE RINGS FOR PLASMA PROCESSING SYSTEMS

by OHKURA, Yuma, KIMBALL, Christopher, EHRLICH, Darrell
Year of Publication 14.04.2022

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Patent

ANODIZATION FOR METAL MATRIX COMPOSITE SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS

ANODIZATION FOR METAL MATRIX COMPOSITE SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS

by SAMULON, Eric, EHRLICH, Darrell, DAS, Debanjan
Year of Publication 03.03.2022

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Patent

SUBSTRATE SUPPORTS WITH MULTILAYER STRUCTURE INCLUDING COUPLED HEATER ZONES WITH LOCAL THERMAL CONTROL

SUBSTRATE SUPPORTS WITH MULTILAYER STRUCTURE INCLUDING COUPLED HEATER ZONES WITH LOCAL THERMAL CONTROL

by MITROVIC, Slobodan, SINGH, Harmeet, WU, Benny, EHRLICH, Darrell
Year of Publication 31.08.2023

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Patent

COOLANT CHANNEL WITH INTERNAL FINS FOR SUBSTRATE PROCESSING PEDESTALS

COOLANT CHANNEL WITH INTERNAL FINS FOR SUBSTRATE PROCESSING PEDESTALS

by SAMULON, Eric, WANG, Feng, EHRLICH, Darrell, MATYUSHKIN, Alexander
Year of Publication 23.03.2023

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Patent

Substrate holder having integrated temperature measurement electrical devices

Substrate holder having integrated temperature measurement electrical devices

by Jing, Mike, Pape, Eric, Ehrlich, Darrell
Year of Publication 13.04.2021

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Patent

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