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멤브레인 전달 방법

멤브레인 전달 방법

by DARRAS FRANCOIS XAVIER, GHYSELEN BRUNO
Year of Publication 19.06.2023

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Patent

변형 가능한 층과 압전층을 포함하는 MEMS 애플리케이션용 복합 구조체 및 관련 제조 방법

변형 가능한 층과 압전층을 포함하는 MEMS 애플리케이션용 복합 구조체 및 관련 제조 방법

by DARRAS FRANCOIS XAVIER, GHYSELEN BRUNO
Year of Publication 15.06.2023

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Patent

층들을 전사하거나 핸들링하는데 사용되는 분리 가능한 구조체 및 상기 분리 가능한 구조체를 사용하여 층을 전사하는 방법

층들을 전사하거나 핸들링하는데 사용되는 분리 가능한 구조체 및 상기 분리 가능한 구조체를 사용하여 층을 전사하는 방법

by DARRAS FRANCOIS XAVIER, LARREY VINCENT
Year of Publication 06.12.2022

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Patent

적층 구조체를 생성하기 위한 프로세스

적층 구조체를 생성하기 위한 프로세스

by DARRAS FRANCOIS XAVIER, GHYSELEN BRUNO
Year of Publication 28.11.2022

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Patent

Determination of the Free Gibbs Energy of Plate-Like Precipitates of Hydrogen Molecules and Silicon Vacancies Formed after H+ Ion Implantation into Silicon and Annealing

Determination of the Free Gibbs Energy of Plate-Like Precipitates of Hydrogen Molecules and Silicon Vacancies Formed after H+ Ion Implantation into Silicon and Annealing

by Cherkashin, Nikolay, Claverie, Alain, Darras, Francois Xavier
Published in Solid state phenomena (2016)

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Journal Article

Modelling of point defect complex formation and its application to H+ ion implanted silicon

Modelling of point defect complex formation and its application to H+ ion implanted silicon

by Cherkashin, N., Darras, F.-X., Pochet, P., Reboh, S., Ratel-Ramond, N., Claverie, A.
Published in Acta materialia (01.10.2015)

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Journal Article

REMOVABLE STRUCTURE FOR TRANSFERRING OR MANIPULATING LAYERS AND METHOD FOR TRANSFERRING LAYERS USING SAME

REMOVABLE STRUCTURE FOR TRANSFERRING OR MANIPULATING LAYERS AND METHOD FOR TRANSFERRING LAYERS USING SAME

by DARRAS FRANCOIS-XAVIER, LARI VIRGINIA
Year of Publication 25.11.2022

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Patent

Method for manufacturing stacked structure

Method for manufacturing stacked structure

by DARRAS FRANCOIS-XAVIER, GHYSELEN BRUNO
Year of Publication 01.11.2022

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Patent

Method for transferring a membrane

Method for transferring a membrane

by GHYSELEN, BRUNO, DARRAS, FRANCOIS XAVIER
Year of Publication 16.05.2022

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Patent

Composite structure for MEMS applications, comprising a deformable layer and a piezoelectric layer, and associated fabrication process

Composite structure for MEMS applications, comprising a deformable layer and a piezoelectric layer, and associated fabrication process

by GHYSELEN, BRUNO, DARRAS, FRANCOIS XAVIER
Year of Publication 16.05.2022

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Patent

Method of fabrication of demountable substrates and assembly for fabricating demountable substrates

Method of fabrication of demountable substrates and assembly for fabricating demountable substrates

by DARRAS, FRANCOIS-XAVIER, BERRE, GUILLAUME, SALVETAT, THIERRY
Year of Publication 16.10.2023

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Patent

Process for producing a stacked structure

Process for producing a stacked structure

by GHYSELEN, BRUNO, DARRAS, FRANCOIS XAVIER
Year of Publication 01.02.2022

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Patent

Detachable structure used for transferring or handling layers, and process for transferring a layer using said detachable structure

Detachable structure used for transferring or handling layers, and process for transferring a layer using said detachable structure

by LARREY, VINCENT, DARRAS, FRANCOIS-XAVIER
Year of Publication 16.12.2021

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Patent

METHOD FOR MANUFACTURING TWO SUBSTRATES CALLED DONOR PSEUDO-SUBSTRATES EACH COMPRISING AT LEAST TWO TILES ON A CARRIER SUBSTRATE

METHOD FOR MANUFACTURING TWO SUBSTRATES CALLED DONOR PSEUDO-SUBSTRATES EACH COMPRISING AT LEAST TWO TILES ON A CARRIER SUBSTRATE

by MOUREY, Odile, DARRAS, Francois Xavier, LANDRU, Didier, MADDALON, Catherine
Year of Publication 27.06.2024

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Patent

Procédé de fabrication de deux substrats dits pseudo-substrats donneurs comprenant chacun au moins deux pavés sur un substrat support

Procédé de fabrication de deux substrats dits pseudo-substrats donneurs comprenant chacun au moins deux pavés sur un substrat support

by LANDRU, DIDIER, MOUREY, ODILE, DARRAS, FRANCOIS XAVIER, MADDALON, Catherine
Year of Publication 21.06.2024

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Patent

Quantification of the number of Si interstitials formed by hydrogen implantation in silicon using boron marker layers

Quantification of the number of Si interstitials formed by hydrogen implantation in silicon using boron marker layers

by Darras, F.-X., Cherkashin, N., Cristiano, F., Scheid, E., Kononchuk, O., Capello, L., Claverie, A.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (15.05.2014)

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Journal Article

MEMBRANE TRANSFER METHOD

MEMBRANE TRANSFER METHOD

by Darras, François-Xavier, Ghyselen, Bruno
Year of Publication 21.12.2023

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Patent

MEMBRANE TRANSFER METHOD

MEMBRANE TRANSFER METHOD

by DARRAS, François-Xavier, GHYSELEN, Bruno
Year of Publication 23.08.2023

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Patent

COMPOSITE STRUCTURE FOR MEMS APPLICATIONS, COMPRISING A DEFORMABLE LAYER AND A PIEZOELECTRIC LAYER, AND ASSOCIATED MANUFACTURING PROCESS

COMPOSITE STRUCTURE FOR MEMS APPLICATIONS, COMPRISING A DEFORMABLE LAYER AND A PIEZOELECTRIC LAYER, AND ASSOCIATED MANUFACTURING PROCESS

by DARRAS, François-Xavier, GHYSELEN, Bruno
Year of Publication 23.08.2023

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Patent

REMOVABLE STRUCTURE USED FOR THE TRANSFER OR MANIPULATION OF LAYERS, AND METHOD FOR TRANSFER OF A LAYER USING SAID REMOVABLE STRUCTURE

REMOVABLE STRUCTURE USED FOR THE TRANSFER OR MANIPULATION OF LAYERS, AND METHOD FOR TRANSFER OF A LAYER USING SAID REMOVABLE STRUCTURE

by Larrey, Vincent, Darras, François-Xavier
Year of Publication 18.05.2023

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Patent